Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 464-467

  Dutta, R K ^a   van Kan, J A ^a   Bettiol, A A ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electroplating; Microlens array; Nanoimprinting Lithography; PMGI resist; Proton beam writing

Indexed keywords

ELECTROPLATING; MICROFABRICATION; MICROSTRUCTURE; NANOIMPRINT LITHOGRAPHY; POLYMERS; PROTON BEAMS;

MICROLENS ARRAY; PMGI RESIST; PROTON BEAM WRITING;

MICROLENSES;

EID: 34249899084     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.064     Document Type: Article

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