A simple design of flat hyperlens for lithography and imaging with half-pitch resolution down to 20 nm

Applied Physics Letters

Volumn 94, Issue 20, 2009, Pages

  Xiong, Yi ^a   Liu, Zhaowei ^a,c   Zhang, Xiang ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY PATTERNS; CYLINDRICAL INTERFACES; DIFFRACTION LIMITED; FLAT INTERFACE; NUMERICAL SIMULATION; SUB-WAVELENGTH;

EID: 65949102983     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3141457     Document Type: Article

References (26)

1. R. J. Blaikie and S. J. McNab, Appl. Opt. 0003-6935 40, 1692 (2001). 10.1364/AO.40.001692
2. J. G. Goodberlet and H. Kavak, Appl. Phys. Lett. 0003-6951 81, 1315 (2002). 10.1063/1.1495538
3. W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, Nano Lett. 1530-6984 4, 1085 (2004). 10.1021/nl049573q
4. X. Luo and T. Ishihara, Opt. Express 1094-4087 12, 3055 (2004). 10.1364/OPEX.12.003055
5. D. O. S. Melville and R. J. Blaikie, J. Vac. Sci. Technol. B 1071-1023 22, 3470 (2004). 10.1116/1.1813462
6. Z. W. Liu, Q. H. Wei, and X. Zhang, Nano Lett. 1530-6984 5, 957 (2005). 10.1021/nl0506094
7. D. B. Shao and S. C. Chen, Appl. Phys. Lett. 0003-6951 86, 253107 (2005). 10.1063/1.1951052
8. T. Xu, Y. Zhao, J. Ma, C. Wang, J. Cui, C. Du, and X. Luo, Opt. Express 1094-4087 16, 13579 (2008). 10.1364/OE.16.013579
9. Y. Xiong, Z. W. Liu, and X. Zhang, Appl. Phys. Lett. 0003-6951 93, 111116 (2008). 10.1063/1.2985898
10. Y. Xiong, Z. W. Liu, and X. Zhang, U.S. Provisional application was filed. See disclosure at http://ipira.berkeley.edu/inventiondetail.php? inventionId=1001849.
11. R. H. Ritchie, Phys. Rev. 106, 874 (1957). 10.1103/PhysRev.106.874
12. W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature (London) 0028-0836 424, 824 (2003). 10.1038/nature01937
13. Z. Jacob, L. V. Alekseyev, and E. Narimanov, Opt. Express 1094-4087 14, 8247 (2006). 10.1364/OE.14.008247
14. A. Salandrino and N. Engheta, Phys. Rev. B 0163-1829 74, 075103 (2006). 10.1103/PhysRevB.74.075103
15. N. Fang, H. Lee, C. Sun, and X. Zhang, Science 0036-8075 308, 534 (2005). 10.1126/science.1108759
16. V. A. Podolskiy and E. E. Narimanov, Opt. Lett. 0146-9592 30, 75 (2005). 10.1364/OL.30.000075
17. Z. W. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, Science 0036-8075 315, 1686 (2007). 10.1126/science.1137368
18. H. Lee, Z. W. Liu, Y. Xiong, C. Sun, and X. Zhang, Opt. Express 1094-4087 15, 15886 (2007). 10.1364/OE.15.015886
19. A. V. Kildishev and E. E. Narimanov, Opt. Lett. 0146-9592 32, 3432 (2007). 10.1364/OL.32.003432
20. H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C. J. Yu, J. B. Geddes III, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, Nature (London) 0028-0836 454, 748 (2008). 10.1038/nature07113
21. A. V. Kildishev and V. M. Shalaev, Opt. Lett. 0146-9592 33, 43 (2008). 10.1364/OL.33.000043
22. V. M. Shalaev, Science 0036-8075 322, 384 (2008). 10.1126/science.1166079
23. S. Han, Y. Xiong, D. Genov, Z. W. Liu, G. Bartal, and X. Zhang, Nano Lett. 1530-6984 8, 4243 (2008). 10.1021/nl801942x
24. P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972). 10.1103/PhysRevB.6.4370
25. M. J. Weber, Handbook of Optical Materials (CRC, Boca Raton, 2003).
26. D. R. Lide, Handbook of Chemistry and Physics (CRC, Boca Raton, 2001).