Main chain decomposable star shaped polymer for EUV resist

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7273, Issue , 2009, Pages

  Iwashita, Jun ^a   Mimura, Takeyoshi ^a   Hirayama, Taku ^a   Iwai, Takeshi ^a  

^a TOKYO OHKA KOGYO CO LTD   (Japan)

Author keywords

Acid diffusion; Arm; Core; EUVL; Main chain decomposable; PHS; STAR polymer; Tg

Indexed keywords

ACID DIFFUSION; ARM; CORE; EUVL; MAIN CHAIN DECOMPOSABLE; STAR POLYMER; TG;

ACIDS; CHROMATOGRAPHIC ANALYSIS; DIFFUSION; EXTREME ULTRAVIOLET LITHOGRAPHY; GELATION; IMAGE QUALITY; LIVING POLYMERIZATION; PHOTORESISTS; THERMODYNAMIC PROPERTIES; ULTRAVIOLET DEVICES;

POLYMERS;

EID: 65849502444     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.813990     Document Type: Conference Paper

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