Effect of backscattered electrons on the analysis area in scanning Auger microscopy

Applied Surface Science

Volumn 230, Issue 1-4, 2004, Pages 327-333

  Powell, C J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Analysis area; Backscattered electrons; Scanning Auger microscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELEMENTARY PARTICLES; FUNCTIONS; GAUSSIAN NOISE (ELECTRONIC); IONIZATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANALYSIS AREA; BACKSCATTERED ELECTRONS; SCANNING AUGUR MICROSCOPY (SAM);

BACKSCATTERING;

EID: 2542497211     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.01.073     Document Type: Article

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