Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Thin Solid Films

Volumn 517, Issue 14, 2009, Pages 4104-4107

  Hwang, Seon Yong ^a   Jung, Ho Yong ^a   Jeong, Jun Ho ^b   Lee, Heon ^a  

^a Korea University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Bi layer imprint; Flexible substrate; Metal nano pattern; PET (polyethylene terephthalate); PVA (poly vinyl alcohol)

Indexed keywords

BI-LAYER IMPRINT; ENVIRONMENTALLY-FRIENDLY; FLEXIBLE SUBSTRATE; LIFT-OFF PROCESS; MATERIAL PROPERTIES; METAL LAYERS; METAL PATTERNS; NANO-IMPRINT LITHOGRAPHIES; NANO-SIZED; NANO-SIZED PATTERNS; OXYGEN PLASMAS; PET (POLYETHYLENE-TEREPHTHALATE); PET FILMS; PLANARIZATION; PVA (POLY-VINYL ALCOHOL); RESIST PATTERNS; SACRIFICIAL LAYERS;

CHEMICAL REACTIONS; CHEMICAL RESISTANCE; METALS; NANOIMPRINT LITHOGRAPHY; OXYGEN; PHOTORESISTS; POLYETHYLENE TEREPHTHALATES; POLYMER FILMS; RESINS; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THERMOPLASTICS;

PLASTIC BOTTLES;

EID: 65449167124     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.164     Document Type: Article

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