Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography

Materials Science Forum

Volumn 510-511, Issue , 2006, Pages 446-449

  Yang, Ki Yeon ^a   Hong, Sung Hoon ^a   Lee, Heon ^a   Choi, Jeong Woo ^b  

^a Korea University   (South Korea)

^b Sogang University   (South Korea)

Author keywords

Bi layer imprinting; Lift off; LOL 2000; UV nano imprint lithography

Indexed keywords

GOLD; RESINS; ULTRAVIOLET RADIATION;

BI-LAYER IMPRINTING; LIFT-OFF;

LITHOGRAPHY;

EID: 35748929981     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-995-4.446     Document Type: Conference Paper

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