Characterization and Cu electroless plating of laser-drilled through-wafer via-holes in GaN/Al2O3

Thin Solid Films

Volumn 517, Issue 14, 2009, Pages 3841-3843

  Ahn, Jaehui ^a   Kim, Hong Yeol ^a   Koo, Hyo Chol ^b   Kim, Jae Jeong ^b   Kim, Jihyun ^a  

^a Korea University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Cu plating; GaN; Laser drilling

Indexed keywords

CU PLATING; DEVICE INTEGRATIONS; DEVICE LAYOUTS; DRILLED HOLES; GAN; HIGH-POWER; LASER DRILLING; MICRO-RAMAN SPECTROSCOPIES; ND : YAG LASERS; SEM/EDX; VIA-HOLES;

DRILLING; ELECTROLESS PLATING; GALLIUM ALLOYS; GALLIUM NITRIDE; LASERS; SEMICONDUCTING GALLIUM;

NEODYMIUM LASERS;

EID: 65449150093     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.160     Document Type: Article

References (14)

1. Razeghi M., and Henini M. Optoelectronic Devices: III-Nitrides (2004), Elsevier
2. Nakamura S., Fasol G., and Pearton S.J. Blue Laser Diode: The Complete Story (2001), Springer-Verlag New York
3. Wu Y.-F., Saxler A., Moore M., Smith R.P., Sheppard S., and Chavarkar P.M. IEEE Electron Device Lett. 25 (2004) 117
4. Dang G.T., Zhang A.P., Ren F., Cao X., Pearton S.J., Cho H., Han J., Chui J.I., Lee C.M., Chuo C.C., Chu S.N.G., and Wilson R.G. IEEE Trans. Electron Devices 47 (2000) 692
5. Spetz A.L., Baranzahi A., Tobias P., and Lundstrom I. Phys. Status Solidi, A 162 (1997) 493
6. Binari S.C., Ikossi K., Roussos J.A., Kruppa W., Park D., Dietrich H.B., Koleske D.D., Wickenden A.E., and Henry R.L. IEEE Trans. Electron Devices 48 (2001) 465
7. Amano H., Kito M., Hiramatsu K., and Akasaki I. Jpn. J. Appl. Phys. 28 (1989) L2112
8. Freitas J.A., Braga G.C.B., Moore W.J., Tischler J.G., Culbertson J.C., Fatemi M., Park S.S., Lee S.K., and Park Y.J. J. Cryst. Growth 231 (2001) 322
9. Chen Y.W., Ooi B.S., Ng I., Radhakrishnan K., and Tan C.L. J. Vac. Sci. Technol., B 18 (2000) 2509
10. Wang C.-C., Lin Y.-L., Lin S.-K., Li C.-S., Huang H.-K., Wu C.-L., Chang C.-S., and Wang Y.-H. J. Vac. Sci. Technol., B 25 (2007) 312
11. Shul R.J., McClellan G.B., Casalnuovo S.A., Rieger D.J., Pearton S.J., Constantine C., Barratt C., Karlicek Jr. R.F., Tran C., and Schurman M. Appl. Phys. Lett. 69 (1996) 1119
12. Harush E., Brandon S., Salzman J., and Paz Y. Semicond. Sci. Technol. 17 6 (2002) 510
13. Anderson T., Ren F., Pearton S.J., Mastro M.A., Holm R.T., Henry R.L., Eddy Jr. C.R., Lee J.Y., Lee K.-Y., and Kim J. J. Vac. Sci. Technol., B 24 (2006) 2246
14. Weber W.H., and Merlin R. Raman Scattering in Materials Science (2000), Springer-Verlag