-
1
-
-
64549116072
-
-
International Technology Roadmap for Semiconductors ITRS
-
International Technology Roadmap for Semiconductors (ITRS), 2007, Process Integration, Devices, & Strucure Chapter, p. 40, 44. www.itrs.net
-
(2007)
Process Integration, Devices, & Strucure Chapter, p. 40, 44
-
-
-
2
-
-
0842266575
-
3 with TaN metal gate for multi-giga bit flash memories
-
3 with TaN metal gate for multi-giga bit flash memories," IEDM Tech. Dig., 2003, pp. 613-616.
-
(2003)
IEDM Tech. Dig
, pp. 613-616
-
-
Lee, C.H.1
Choi, K.I.2
Cho, M.K.3
Song, Y.H.4
Park, K.C.5
Kim, K.6
-
3
-
-
4544344826
-
Sub-40nm tri-gate charge trapping nonvolatile memory cells for high-density applications
-
M. Specht, R. Kommling, L. Dreeskornfeld, W. Weber, F. Hofmann, D. Alvarez, J. Kretz, R.J. Luyken, W. Rosner, H. Reisinger, E. Landgraf, T. Schulz, J. Hartwich, M. Stadele, V. Klandievski, E. Hartmann, and L. Risch, "Sub-40nm tri-gate charge trapping nonvolatile memory cells for high-density applications," Symp. on VLSI Tech. Dig., 2004, pp. 244-245.
-
(2004)
Symp. on VLSI Tech. Dig
, pp. 244-245
-
-
Specht, M.1
Kommling, R.2
Dreeskornfeld, L.3
Weber, W.4
Hofmann, F.5
Alvarez, D.6
Kretz, J.7
Luyken, R.J.8
Rosner, W.9
Reisinger, H.10
Landgraf, E.11
Schulz, T.12
Hartwich, J.13
Stadele, M.14
Klandievski, V.15
Hartmann, E.16
Risch, L.17
-
4
-
-
21644475526
-
Damascene gate FinFET SONOS memory implemented on bulk silicon wafer
-
C. W. Oh, S. D. Suk, Y. K. Lee, S. K. Sung, J. Choe, S. Lee, D. U. Choi, K. H. Yeo, M. S. Kim, S. Kim, M. Li, S. H. Kim, E. Yoon, D. Kim, D. Park, K. Kim, and B. Ryu, "Damascene gate FinFET SONOS memory implemented on bulk silicon wafer," IEDM Tech. Dig., 2004, pp. 893-896.
-
(2004)
IEDM Tech. Dig
, pp. 893-896
-
-
Oh, C.W.1
Suk, S.D.2
Lee, Y.K.3
Sung, S.K.4
Choe, J.5
Lee, S.6
Choi, D.U.7
Yeo, K.H.8
Kim, M.S.9
Kim, S.10
Li, M.11
Kim, S.H.12
Yoon, E.13
Kim, D.14
Park, D.15
Kim, K.16
Ryu, B.17
-
5
-
-
33745134383
-
th and good retention
-
th and good retention," in Symp. on VLSI Tech. Dig., 2005, pp. 210-211.
-
(2005)
Symp. on VLSI Tech. Dig
, pp. 210-211
-
-
Lai, C.H.1
Chin, A.2
Chiang, K.C.3
Yoo, W.J.4
Cheng, C.F.5
McAlister, S.P.6
Chi, C.C.7
Wu, P.8
-
6
-
-
64549127952
-
-
Albert Chin, C. C. Laio, K. C. Chiang, D. S. Yu, W. J. Yoo, G. S. Samudra, S. P. McAlister, and C. C. Chi, Low voltage high speed
-
Albert Chin, C. C. Laio, K. C. Chiang, D. S. Yu, W. J. Yoo, G. S. Samudra, S. P. McAlister, and C. C. Chi, "Low voltage high speed
-
-
-
-
7
-
-
64549127515
-
-
3/TaN memory with good retention, in IEDM Tech.
-
3/TaN memory with good retention," in IEDM Tech.
-
-
-
-
8
-
-
64549127091
-
-
Dig., 2005, pp. 165-168.
-
(2005)
Dig
, pp. 165-168
-
-
-
9
-
-
41149145759
-
Very Low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retention
-
C. H. Lai, Albert Chin, H. L. Kao, K. M. Chen, M. Hong, J. Kwo, and C. C. Chi, "Very Low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retention," in Symp. on VLSI Tech. Dig., 2006, pp. 54-55.
-
(2006)
Symp. on VLSI Tech. Dig
, pp. 54-55
-
-
Lai, C.H.1
Chin, A.2
Kao, H.L.3
Chen, K.M.4
Hong, M.5
Kwo, J.6
Chi, C.C.7
-
10
-
-
41749084389
-
Improved high temperature retention for charge-trapping memory by using double quantum barriers
-
April
-
H. J. Yang, Albert Chin, S. H. Lin, F. S. Yeh, and S. P. McAlister, "Improved high temperature retention for charge-trapping memory by using double quantum barriers," IEEE Electron Device Lett., vol. 29, pp. 386-388, April 2008.
-
(2008)
IEEE Electron Device Lett
, vol.29
, pp. 386-388
-
-
Yang, H.J.1
Chin, A.2
Lin, S.H.3
Yeh, F.S.4
McAlister, S.P.5
-
11
-
-
46049095270
-
Novel charge trap devices with NCBO trap layers for NVM or image sensor
-
K. H. Joo, C. R. Moon, S. N. Lee, X. Wang, J. K. Yang, I. S. Yeo, D. Lee, O. Nam, U. I. Chung, J. T. Moon, and B. I. Ryu, "Novel charge trap devices with NCBO trap layers for NVM or image sensor," in IEDM Tech. Dig., 2006, pp. 979-982.
-
(2006)
IEDM Tech. Dig
, pp. 979-982
-
-
Joo, K.H.1
Moon, C.R.2
Lee, S.N.3
Wang, X.4
Yang, J.K.5
Yeo, I.S.6
Lee, D.7
Nam, O.8
Chung, U.I.9
Moon, J.T.10
Ryu, B.I.11
-
12
-
-
64549156650
-
-
H. T. Lue, S. Y. Wang, E. K. Lai, Y. H. Shih, S. C. Lai, L. W. Yang, K
-
H. T. Lue, S. Y. Wang, E. K. Lai, Y. H. Shih, S. C. Lai, L. W. Yang, K.
-
-
-
-
13
-
-
64549133981
-
-
C. Chen, J. Ku, K. Y. Hsieh, R. Liu, and C. Y. Lu, BE-SONOS: A Bandgap Engineered SONOS with Excellent Performance and
-
C. Chen, J. Ku, K. Y. Hsieh, R. Liu, and C. Y. Lu, "BE-SONOS: A Bandgap Engineered SONOS with Excellent Performance and
-
-
-
-
14
-
-
64549130592
-
-
Reliability, in IEDM Tech. Dig., 2005, pp. 547-550.
-
Reliability", in IEDM Tech. Dig., 2005, pp. 547-550.
-
-
-
-
15
-
-
0141761571
-
Novel multi-bit SONOS type flash memory using a high-k charge trapping layer
-
T. Sugizaki, M. Kobayashi, M. Ishidao, H. Minakata, M. Yamaguchi, Y. Tamura, Y. Sugiyama, T. Nakanishi, and H. Tanaka, "Novel multi-bit SONOS type flash memory using a high-k charge trapping layer," Symp. on VLSI Tech., 2003, pp. 27-28.
-
(2003)
Symp. on VLSI Tech
, pp. 27-28
-
-
Sugizaki, T.1
Kobayashi, M.2
Ishidao, M.3
Minakata, H.4
Yamaguchi, M.5
Tamura, Y.6
Sugiyama, Y.7
Nakanishi, T.8
Tanaka, H.9
-
16
-
-
0842330011
-
Scaled 2bit/cell SONOS type nonvolatile memory technology for sub-90nm embedded application using SiN sidewall trapping structure
-
M. Fukuda, T. Nakanishi, and Y. Nara, "Scaled 2bit/cell SONOS type nonvolatile memory technology for sub-90nm embedded application using SiN sidewall trapping structure," IEDM Tech. Dig., 2003, pp. 909-912.
-
(2003)
IEDM Tech. Dig
, pp. 909-912
-
-
Fukuda, M.1
Nakanishi, T.2
Nara, Y.3
-
17
-
-
34948862160
-
05 MIS capacitor with good retention
-
Oct
-
05 MIS capacitor with good retention," IEEE Electron Device Lett., vol. 28, pp. 913-915, Oct. 2007.
-
(2007)
IEEE Electron Device Lett
, vol.28
, pp. 913-915
-
-
Yang, H.J.1
Chin, A.2
Chen, W.J.3
Cheng, C.F.4
Huang, W.L.5
Hsieh, I.J.6
McAlister, S.P.7
-
18
-
-
44949226211
-
y trapping layers with different N compositions
-
June
-
y trapping layers with different N compositions," IEEE Trans. Electron Device, vol. 55, pp. 1417-1423, June 2008.
-
(2008)
IEEE Trans. Electron Device
, vol.55
, pp. 1417-1423
-
-
Yang, H.J.1
Cheng, C.F.2
Chen, W.B.3
Lin, S.H.4
Yeh, F.S.5
McAlister, S.P.6
Chin, A.7
-
22
-
-
46049092232
-
3Si-TaN]/HfLaON CMOS with large work-function difference
-
3Si-TaN]/HfLaON CMOS with large work-function difference," IEDM Tech. Dig., 2006, pp. 617-620.
-
(2006)
IEDM Tech. Dig
, pp. 617-620
-
-
Wu, C.H.1
Hung, B.F.2
Chin, A.3
Wang, S.J.4
Wang, X.P.5
Li, M.-F.6
Zhu, C.7
Jin, Y.8
Tao, H.J.9
Chen, S.C.10
Liang, M.S.11
-
23
-
-
50249162020
-
t [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions
-
t [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions," IEDM Tech. Dig., 2007, pp. 333-336.
-
(2007)
IEDM Tech. Dig
, pp. 333-336
-
-
Cheng, C.F.1
Wu, C.H.2
Su, N.C.3
Wang, S.J.4
McAlister, S.P.5
Chin, A.6
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