Very low Vt [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 333-336

  Cheng, C F ^a   Wu, C H ^b   Su, N C ^b   Wang, S J ^b   McAlister, S P ^c   Chin, Albert ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES;

EID: 50249162020     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418939     Document Type: Conference Paper

References (9)

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