Development of all metal electrothermal actuator and its applications

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 2, 2005, Pages 1-9

  Luo, JiKui ^a   He, Johnny H ^a   Flewitt, Andrew ^a   Moore, D F ^a   Spearing, S Mark ^b   Fleck, Norman A ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Electroplating; Electrothermal actuator; Finite element analysis; Heatuator; Metal thermal actuator; Microswitch; Microtweezers; Ni

Indexed keywords

ELECTROTHERMAL ACTUATOR; HEATUATOR; METAL THERMAL ACTUATOR; MICROSWITCH; MICROTWEEZERS;

DEFLECTION (STRUCTURES); FUNCTIONS; NICKEL; SWITCHES; THIN FILMS;

ACTUATORS;

EID: 24744445414     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1898243     Document Type: Article

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