Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation

Microsystem Technologies

Volumn 10, Issue 4, 2004, Pages 275-280

  Kim, D H ^a   Kim, B ^a   Kang, H ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Force sensing; Microassembly; Microgripper; Micromanipulation; Piezoelectric polymer; PVDF

Indexed keywords

ELECTRIC DISCHARGE MACHINING; MANIPULATORS; MICROMACHINING; MICROSENSORS; PIEZOELECTRIC DEVICES; POLYVINYL ALCOHOLS; ROBOTIC ASSEMBLY;

FORCE SENSING; MICROASSEMBLY; MICROGRIPPERS; MICROMANIPULATION; PIEZOELECTRIC POLYMER; PVDF;

GRIPPERS;

EID: 3042688546     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0330-y     Document Type: Article

References (15)

1. Aral F; Lee GU; Colton RJ (1998) Integrated microendeffector for micromanipulation. IEEE/ASME Transac Mechatronics 3(1): 17-23
2. Barsky MF; Lindner DK; Claus RO (1989) Robot gripper control system using PVDF piezoelectric sensors. IEEE Transact Ultrasonics, Ferroelectrics, and Frequency Control 36(1): 129-134
3. Dargahi J; Parameswaran M; Payandeh S (2000) A micromachined piezoelectric tactile sensor for an endoscopic grasper-theory, fabrication and experiments. Journal of Microelectromechanical Systems 9(3): 329-335
4. Fung CKM; Elhajj I; Li WJ; Xi N (2002) A 2-D PVDF force sensing system for micromanipulation and microassembly. Proceedings of IEEE International Conference on Robotics and Automation, pp. 1489-1494
5. Goldfarb M; Celanovic N (1999) A flexure-based gripper for small-scale manipulation. Robotica 17(2): 181-188
6. Kim C-J; Pisano AP; Muller RS; Lim MG (1992) Polysilicon microgripper. Sensors and Actuators A (Physical) 33: 221-227
7. Kim S-M; Kim K; Shim JH; Kim B; Kim D-H; Chung C-C (2002) Position and force control of a sensorized microgripper. Proceedings of the 2002 International Conference on Control, Automation and System, pp. 319-322
8. Menciassi A; Scalari G; Eisinberg A; Anticoli C; Francabandiera P; Carrozza MC; Dario P (2001) An instrumented probe for mechanical characterization of soft tissues. Biomedical Microdevices 149-156
9. Nelson BJ; Zhou Y; Vikramaditya B (1998) Sensor-based microassembly of hybrid MEMS devices. IEEE Control Sys 18(6): 35-45
10. Popa D; Kang BH; Sin J; Zou J (2000) Reconfigurable microassembly system for photonics applications. Proceedings of IEEE International Conference on Robotics and Automation, pp. 192-197
11. Rossi D; Lazzeri D; Domenici L; Nannini C; Basser P (1989) Tactile sensing by an electromechano-chemical skin. Sensors and Actuators A (Physical) 17: 107-111
12. Sitti. M; Horighuchi S; Hashimoto H (1999) Tele-touch feedback of surface at the micro/nano scale: modeling and experiments. Proceedings of 1999 IEEE/RSJ International Conference Robotics and Systems, vol 2, pp. 882-888
13. Tanikawa T; Aral T (1999) Development of micro-manipulation system having a two-fingered micro-hand. IEEE Transactions on Robotics and Automation 15: 152-162
14. Zesch W; Brunner M; Weber A (1997) Vacuum tool for handling microobjects with a nanorobot. Proceedings of 1997 IEEE International Conference on Robotics and Automation, pp. 1761-1766
15. Zhou Y; Nelson BJ (2000) The effect of material properties and gripping force on micrograsping. Proceedings of 2000 IEEE Conference on Robotics and Automation, pp. 1115-1120