Topology optimization of electrostatically actuated microsystems

Structural and Multidisciplinary Optimization

Volumn 30, Issue 5, 2005, Pages 342-359

  Raulli, M ^a   Maute, K ^b  

^a Villanova University   (United States)

^b UCB 450   (United States)

Author keywords

Adjoint formulation; Electrostatic mechanical coupling; Microelectromechanical systems; Sensitivity analysis; Topology optimization

Indexed keywords

ELECTRODES; INTERFACES (COMPUTER); OPTIMIZATION; SENSITIVITY ANALYSIS;

ADJOINT FORMULATION; ELECTROSTATIC- MECHANICAL COUPLING; MICROELECTROMECHANICAL SYSTEMS; TOPOLOGY OPTIMIZATION;

MICROELECTRONICS;

EID: 27644592374     PISSN: 1615147X     EISSN: 16151488     Source Type: Journal    
DOI: 10.1007/s00158-005-0531-3     Document Type: Article

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