Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever

Review of Scientific Instruments

Volumn 80, Issue 3, 2009, Pages

  Kim, Sang Jin ^a,b,c   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c Samsung Electro Mechanics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIMETALS; CHROMIUM; NANOCANTILEVERS; NATURAL FREQUENCIES;

GLASS SUBSTRATES; MICRO HEATERS; POTENTIAL ABILITIES; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; SILICON CANTILEVERS; SIMULTANEOUS MEASUREMENTS; TAPPING MODES; TEMPERATURE CO-EFFICIENT; TEMPERATURE PROFILES; TEMPERATURE RESOLUTIONS; THERMAL DETECTIONS; THERMAL IMAGING; THERMAL SENSORS; THERMAL SHIFTS; THIN CHROMIUM FILMS;

FREQUENCY RESPONSE;

EID: 63649158672     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3095680     Document Type: Article

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