Magnetic force and optical force sensing with ultrathin silicon resonator

Review of Scientific Instruments

Volumn 74, Issue 12, 2003, Pages 5141-5146

  Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; LASER PULSES; MAGNETIC MOMENTS; MAGNETIC VARIABLES MEASUREMENT; SILICON; SINGLE CRYSTALS; TORQUE; ULTRAHIGH VACUUM; VIBRATION MEASUREMENT;

OPTICAL FORCE SENSING; ULTRATHIN SILICON RESONATORS;

RESONATORS;

EID: 0346306093     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1623627     Document Type: Article

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