Effect of (Ba + Sr/Ti) ratio on the dielectric properties for highly (1 1 1) oriented (Ba,Sr)TiO3 thin films

Journal of Alloys and Compounds

Volumn 475, Issue 1-2, 2009, Pages 827-831

  Wang, Yi ^a   Liu, Baoting ^b   Wei, Feng ^a   Yang, Zhimin ^a   Du, Jun ^a  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

^b HEBEI UNIVERSITY   (China)

Author keywords

Crystal structure; Dielectric; Magnetron sputtering deposition; Thin films

Indexed keywords

ATOMIC SPECTROSCOPY; BARIUM; BARIUM TITANATE; CERAMIC CAPACITORS; DIELECTRIC WAVEGUIDES; INDUCTIVELY COUPLED PLASMA; MAGNETRONS; PERMITTIVITY; SEMICONDUCTING SILICON COMPOUNDS; STOICHIOMETRY; STRONTIUM; STRONTIUM COMPOUNDS; SURFACE STRUCTURE; THIN FILMS;

ATOMIC RATIOS; BARIUM STRONTIUM TITANATE THIN FILMS; DEPOSITION PRESSURES; DIELECTRIC; DIELECTRIC CONSTANTS; INDUCTIVELY COUPLED PLASMA SPECTROSCOPIES; MAGNETRON SPUTTERING DEPOSITION; RF- MAGNETRON SPUTTERING; SEM; SI SUBSTRATES; TEM; TUNABILITY; XRD;

CRYSTAL STRUCTURE;

EID: 63649157697     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2008.08.012     Document Type: Article

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