Enhanced tunability of magnetron sputtered Ba0.5Sr 0.5TiO3 thin films on c-plane sapphire substrates

Applied Physics Letters

Volumn 89, Issue 2, 2006, Pages

  Fardin, E A ^a   Holland, A S ^a   Ghorbani, K ^a   Reichart, P ^b  

^a RMIT UNIVERSITY   (Australia)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; Q FACTOR MEASUREMENT; SAPPHIRE;

COMPLEMENTARY MATERIALS ANALYSIS METHODS; INTERDIGITAL CAPACITORS (IDC); SAPPHIRE SUBSTRATES; TUNABILITY;

THIN FILMS;

EID: 33746047122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2220530     Document Type: Article

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