Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films

Journal of Applied Physics

Volumn 87, Issue 10, 2000, Pages 7430-7437

  Gao, Y ^a   Perkins, C L ^a   He, S ^a   Alluri, P ^b   Tran, T ^a   Thevuthasan, S ^a   Henderson, M A ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000628076     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373005     Document Type: Article

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