Optical scanners realized by surface-micromachined vertical torsion mirror

IEEE Photonics Technology Letters

Volumn 11, Issue 5, 1999, Pages 587-589

  Su, Guo Dung J ^a   Lee, Shi Sheng ^a   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; NATURAL FREQUENCIES; SCANNING;

ELECTROSTATIC ACTUATORS; OPTICAL SCANNERS; VERTICAL TORSION MIRRORS;

MIRRORS;

EID: 0032682334     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.759407     Document Type: Article

References (14)

1. M.-H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Highprecision silicon micromachined micromirrors for laser beam scanning and positioning," presented at the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2-6, 1996. late news paper.
2. M. E. Motamedi, S. Park, A. Wang, M. Dadkhah, A. P. Andrews, H. O. Marcy, M. Khoshnevisan, A. E. Chiou, R. J. Huhn, C. F. Sell, and J. G. Smits, "Development of micro-electro-mechanical optical scanner," Opt. Eng., SPIE, vol. 36, no. 5, pp. 1346-1353, May 1997.
3. M. Ikeda, H. Goto, H. Totani, M. Sakata, and T. Yada, "Two-dimensional miniature optical scanning sensor with silicon micromachined scanning mirror," in Proc. SPIE, Miniaturized Systems with Micro-Optics and Micromechanics II, San Jose, CA, Feb. 1997, vol. 3008, pp. 111-122.
4. R. A. Miller and Y. C. Tai, "Micromachined electromagnetic scanning mirrors," Opt. Eng., vol. 36, no. 5. pp. 1399-1407, May 1997.
5. R. S. Muller and K. Y. Lau, "Surface-micromachined microoptical elements and systems," Proc. IEEE, vol. 86, pp. 1705-1720, Aug. 1998.
6. M. Wu, "Micromachining for optical and optoelectronic systems," Proc. IEEE, vol. 85, pp. 1833-1856, Nov. 1997.
7. L. Fan, M. Wu, K. Choquette, and M. Crawford. "Self-assembled microactuated XYZ stages for optical scanning and alignment," in Proc. Int. Solid State Sensors Actuators Conf. (Transducer'97), Chicago, IL, June 1997, pp. 319-322.
8. P. F. Van Kessel, L. J. Hornbeck. R. E. Meier, and M. R. Douglass, "A MEMS-based projection display," Proc. IEEE, vol. 86. pp. 1687-1704, Aug. 1998.
9. K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, "MEMS infrastructure. The multi-user MEMS processes (MUMP's)," Proc. SPIE, vol. 2639, pp. 225-235, 1996.
10. H. Toshiyoshi and H. Fujita, "Electrostatic micro-torsion mirrors for an optical switch matrix," J. Microelectromech. Syst., vol. 5, pp. 231-237, Dec. 1996.
11. J. Hagerman, "Optimum spot size for raster-scanned monochrome CRT displays," J. SID, vol. 1, no. 3, pp. 367-369, 1993.
12. P. Belland and J. P. Crenn, "Changes in the characteristics of a Gaussian beam weakly diffracted by a circular aperture," Appl. Opt., vol. 21, no. 3, pp. 522-527, Feb. 1982.
13. P. J. Brosens, "Dynamic mirror distortions in optical scanning," Appl. Opt., vol. 34, no. 30, pp. 6826-6828, Oct. 1995.
14. S.-S. Lee and M. C. Wu, "Surface-micromachined vertical torsion mirror switches," presented at the Int. Conf. Optical MEMS and their Applications (MOEMS '97), Nara, Japan, Nov. 18-21. 1997.