Microstructure and surface topography evolution of Ti and Ni thin structures

Materials and Manufacturing Processes

Volumn 19, Issue 5, 2004, Pages 883-897

  Allameh, S M ^a   Soboyejo, W O ^b  

^a NORTHERN KENTUCKY UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

Microstructure; Ni; Surface topography; Thin films; Ti

Indexed keywords

CRYSTALS; DEPOSITION; ELECTRON BEAMS; MICROSTRUCTURE; SILICON; SODIUM CHLORIDE; SURFACE TOPOGRAPHY; THICKNESS CONTROL; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON-BEAM DEPOSITION; FILM ROUGHNESS; SILICON SUBSTRATES; THIN STRUCTURES;

THIN FILMS;

EID: 6344243465     PISSN: 10426914     EISSN: None     Source Type: Journal    
DOI: 10.1081/AMP-200030590     Document Type: Conference Paper

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