Micro variable inductor chip using MEMS relays

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1137-1140

  Zhou, Shifang ^a   Sun, Xi Qing ^a   Carr, William N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RELAYS; ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; VOLTAGE CONTROL;

BULK MICROMACHINING; CONTACT RESISTANCE; ELECTROSTATIC ACTUATION; INDUCTANCE; MICRORELAYS; SURFACE MICROMACHINING; THERMAL ACTUATION; VARIABLE INDUCTOR;

ELECTRIC INDUCTORS;

EID: 0030688101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)