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Journal of Materials Processing Technology

Volumn 83, Issue 1-3, 1998, Pages 209-216

Mechanical and tribological properties of ion-beam-enhanced-deposition TiN thin films

(4) Fu, Yongqing a,b Zhu, Xiaodong a Xu, Kewei a He, Jiawen a

a XI'AN JIAOTONG UNIVERSITY (China)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Bonding strength; Ion beam enhanced deposition (IBED); Microhardness; Microstructure; TiN film; Tribology

Indexed keywords

BOND STRENGTH (MATERIALS); CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; FATIGUE TESTING; GRAIN SIZE AND SHAPE; ION BEAMS; ION BOMBARDMENT; MICROHARDNESS; SPUTTER DEPOSITION; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE;

ION-BEAM-ENHANCED DEPOSITION (IBED);

TITANIUM NITRIDE;

EID: 0032210073 PISSN: 09240136 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-0136(98)00064-8 Document Type: Article

Times cited : (8)

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