Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

Scripta Materialia

Volumn 50, Issue 6, 2004, Pages 915-919

  Allameh, S M ^a   Yao, N ^a   Soboyejo, W O ^a  

^a Princeton University   (United States)

Author keywords

Ion beam processing; Nanostructures; Platinum; Thin films

Indexed keywords

ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOLECULAR STRUCTURE; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; NUCLEATION; POLYSILICON; SUBSTRATES; THIN FILMS;

GROWTH RATES; ION BEAM PROCESSING;

SELF ASSEMBLY;

EID: 0345868364     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2003.05.001     Document Type: Article

References (8)

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