Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Sensors and Actuators, B: Chemical

Volumn 126, Issue 2, 2007, Pages 431-440

  Li, Y ^a   Vancura, C ^a   Barrettino, D ^a   Graf, M ^a   Hagleitner, C ^a   Kummer, A ^a   Zimmermann, M ^a   Kirstein, K U ^a   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Cantilever; Capacitor; CMOS; Gas sensor; Metal oxide; Microhotplate; Multi transducer system; Polymer

Indexed keywords

CANTILEVER BEAMS; CAPACITORS; CMOS INTEGRATED CIRCUITS; GRAVIMETRIC ANALYSIS; MICROSYSTEMS; SENSOR ARRAYS; SIGNAL PROCESSING; TRANSDUCERS;

CAPACITIVE SENSORS; DIGITAL COMMUNICATION; INORGANIC GASES; THICK POLYMERS;

CHEMICAL SENSORS;

EID: 34548652435     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.03.035     Document Type: Article

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