Sensitivity of micro cantilever mass sensor transduced by PZT film

IEEJ Transactions on Sensors and Micromachines

Volumn 127, Issue 3, 2007, Pages

  Lu, Jian ^a   Ikehara, Tsuyoshi ^a   Konno, Mitsuo ^a   Maeda, Ryutaro ^a   Mihara, Takashi ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Mass sensor; MEMS; PZT cantilever; Quality factor; Sensitivity

Indexed keywords

FILM THICKNESS; IMPEDANCE MATCHING (ELECTRIC); MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; RESIDUAL STRESSES; SENSITIVITY ANALYSIS;

MASS SENSORS; PZT CANTILEVERS; QUALITY FACTOR;

MICROSENSORS;

EID: 33847714089     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.127.126     Document Type: Conference Paper

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