Preparation of BaTiO3-BaZrO3 films by metal-organic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6643-6646

  Tohma, Tetsuro ^a   Masumoto, Hiroshi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Ba(Ti1 xZrx)O3; Barium titanate; Ferroelectric properties; Film; Metalorganic chemical vapor deposition

Indexed keywords

BARIUM TITANATE; FERROELECTRICITY; THIN FILMS; ZIRCONIUM;

BA(TI1-XZRX)O3; FERROELECTRIC PROPERTIES; FILM;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0344432617     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.6643     Document Type: Article

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