Excimer UV-assisted preparation of zirconium silicate layers

Thin Solid Films

Volumn 453-454, Issue , 2004, Pages 215-218

  Yu, J J ^a   Boyd, I W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

Excimer lamps; Photon processing; Silicate; Sol gel processing; Zirconium

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL BONDS; CURRENT DENSITY; HIGH TEMPERATURE EFFECTS; LEAKAGE CURRENTS; OXYGEN; PHOTONS; SILICATES; SOL-GELS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM; ZIRCONIUM COMPOUNDS;

EXCIMER LAMPS; PHOTON PROCESSING; SOL-GEL PROCESSING;

THIN FILMS;

EID: 1542635963     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.122     Document Type: Conference Paper

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