Deposition of undoped indium oxide thin films on stripe-patterned substrates by spray CVD

Journal of Crystal Growth

Volumn 311, Issue 3, 2009, Pages 642-646

  Kondo, T ^a   Funakubo, H ^b   Akiyama, K ^c   Enta, H ^a   Seki, Y ^a   Wang, M H ^a   Uchida, T ^a   Sawada, Y ^a  

^a TOKYO POLYTECHNIC UNIVERSITY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

A1. Nanostructures; A3. Chemical vapor deposition processes; B1. Oxides; B2. Semiconducting indium compounds

Indexed keywords

CHLORINE COMPOUNDS; DEPOSITION; ELECTRODEPOSITION; ETHANOL; INDIUM; INDIUM COMPOUNDS; NANOSTRUCTURES; OXIDE FILMS; SEMICONDUCTING INDIUM; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THICK FILMS; VAPORS;

A1. NANOSTRUCTURES; A3. CHEMICAL VAPOR DEPOSITION PROCESSES; B1. OXIDES; B2. SEMICONDUCTING INDIUM COMPOUNDS; CHEMICAL VAPORS; DEPOSITION MECHANISMS; DEPOSITION TEMPERATURES; ETHANOL SOLUTIONS; HIGHER TEMPERATURES; INDIUM OXIDE FILMS; INDIUM OXIDES; ITO FILMS; PATTERNED SUBSTRATES; SI SUBSTRATES; STEP COVERAGES;

CHEMICAL VAPOR DEPOSITION;

EID: 59849129030     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.09.043     Document Type: Article

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