Low-Cost Deposition of Highly-Conducting Indium-Tin-Oxide Transparent Films by Chemical Process; Spray CVD and Dip Coating

Materials Science Forum

Volumn 437-438, Issue , 2003, Pages 23-26

  Sawada, Y ^a  

^a TOKYO POLYTECHNIC UNIVERSITY   (Japan)

Author keywords

Chemical Vapor Deposition; Dip Coating; Indium Tin Oxide; Spray Pyrolysis; Transparent Conducting Films

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; COMPOSITION; DEPOSITION; ETHANOL; X RAY DIFFRACTION ANALYSIS;

TRANSPARENT FILMS;

INDIUM COMPOUNDS;

EID: 0242322748     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.437-438.23     Document Type: Conference Paper

References (5)

1. Y. Sawada, C. Kobayashi, S. Seki and H. Funakubo, Thin Solid Films, 409 (2002) 46-50.
2. H. Ohta, M. Orita, M. Hirano, H. Tanji, H. Kawazoe and H. Hosono, Appl. Phys. Lett., 76 (19), (2000) 2740-2742.
3. S. Seki, Y. Sawada and T. Nishide, Thin Solid Films, 388 (2001) 22-26.
4. S. Seki, M. Ogawa and Y. Sawada, Jpn. J. Appl. Phys., 40 (2001) L1244-L1246.
5. G. Frank and H. Köstlin, Appl. Phys., A27 (1982) 69-75.