On the understanding of positive and negative ionization processes during ToF-SIMS depth profiling by co-sputtering with cesium and xenon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 3, 2009, Pages 519-524

  Brison, J ^a   Guillot, J ^b   Douhard, B ^a   Vitchev, R G ^c   Migeon, H N ^b   Houssiau, L ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

^b LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY   (Luxembourg)

^c FLEMISH INSTITUTE FOR TECHNOLOGICAL RESEARCH VITO   (Belgium)

Author keywords

AES; Cesium; Gallium; Ionization; Sputtering; ToF SIMS; Work function; Xenon

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CESIUM; DEPTH PROFILING; FUNCTIONS; IONIZATION; IONIZATION OF LIQUIDS; IONS; PROBABILITY DENSITY FUNCTION; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; SURFACE REACTIONS; WORK FUNCTION; XENON;

AES; AUGER ELECTRONS; CO-SPUTTERING; DEPTH PROFILES; DUAL-BEAM DEPTH PROFILING; ELECTRON-TUNNELING MODELS; GALLIUM; IN-SITU; ION YIELDS; IONIZATION PROCESS; SECONDARY IONS; SPUTTERING; STEADY STATE; SURFACE CONCENTRATIONS; TOF-SIMS; XENON IONS;

CESIUM COMPOUNDS;

EID: 59549088147     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.11.026     Document Type: Article

References (43)

1. Magee C.W., Harrington W.L., and Botnick E.M. Int. J. Mass Spect. Ion Proc. 103 (1990) 45
2. Ray M.A., Baker J.E., Loxton C.M., and Green J.E. J. Vac. Sci. Technol. A6 (1988) 44
3. J.M. Shroeer, H. Gnaser, H. Oechsner, SIMS IX, Yokohama, 1994, p. 384.
4. Gao Y. J. Appl. Phys. 64 (1988) 3760
5. Brison J., Conard T., Vandervorst W., and Houssiau L. Appl. Surf. Sci. 231&232 (2003) 749
6. Niehuis E., and Grehl T. In: Vickerman J.C., and Briggs D. (Eds). ToF-SIMS (2001), IMPublications, Chichester, West Sussex, UK 753
7. Brison J., Douhard B., and Houssiau L. Appl. Surf. Sci. 252 (2006) 6440
8. Brison J., and Houssiau L. Surf. Interface Anal. 38 (2006) 1715
9. Vickerman J.C. In: Vickerman J.C., and Briggs D. (Eds). ToF-SIMS (1988), IMPublications, Chichester, West Sussex, UK 1
10. Eckstein W., Hou M., and Shulga V.I. Nucl. Instr. and Meth. B 119 (1996) 477
11. Wittmaack K., Blank P., and Wach W. Rad. Effects 39 (1978) 81
12. Menzel N., and Wittmaack K. Nucl. Instr. and Meth. B 191 (1981) 235
13. Brison J., Vitchev R.G., and Houssiau L. Nucl. Instr. and Meth. B 266 (2008) 5159
14. Chelgren J.E., Katz W., Deline V.R., Evans C.A., Blattner R.J., and Williams P. J. Vac. Sci. Technol. 16 (1979) 324
15. Deline V.R., Katz W., Evans Jr C.A., and Williams P. Appl. Phys. Lett. 33 (1978) 832
16. Gnaser H. Phys. Rev. B 54 (1996) 16455
17. Herec J., Sielanko J., Filiks J., and Sowa M. Vacuum 63 (2001) 743
18. van der Heide P.A.W., Lupu C., Kutana A., and Rabalais J.W. Appl. Surf. Sci. 231&232 (2004) 90
19. Marie Y., Gao Y., Saldi F., and Migeon H.N. Surf. Interf. Anal. 23 (1995) 38
20. Yu M.L. Phys. Rev. Lett. 40 (1978) 574
21. Yu M.L. Phys. Rev. Lett. 47 (1981) 1981
22. Yu M.L. In: Behrisch R. (Ed). Sputtering by Particle Bombardment III (1991), Springer Verlag, Berlin 91
23. Villegas A., Kudravtsev Yu., Godines A., and Asomosa R. Appl. Surf. Sci. 203&204 (2003) 94
24. Gnaser H. Phys. Rev. B 54 (1996) 17141
25. Brison J., Mine N., Poisseroux S., Douhard B., Vitchev R.G., and Houssiau L. Surf. Sci. 601 (2007) 1467
26. Yu M.L. Phys. Rev. B 29 (1984) 2311
27. van der Heide P.A.W., and Azzarello F.Z. Surf. Sci. Lett. 531 (2003) 369
28. Kudriavtsev Y., and Asomosa R. Appl. Surf. Sci. 167 (2000) 12
29. Zangwill A. Physics at Surfaces (1988), Cambridge University Press, NY 10022, USA
30. Bernheim M., and Le Bourse F. Nucl. Instr. and Meth. B 27 (1987) 94
31. Ferrari S., Perego M., and Fanciulli M. Appl. Surf. Sci. 203&204 (2003) 52
32. Sarkar S., and Chakraborty P. Nucl. Instr. and Meth. B 232 (2005) 153
33. Wirtz T., and Migeon H.-N. Surf. Sci. 561 (2004) 200
34. Betz G., and Wehner G.K. In: Behrisch R. (Ed). Sputtering by Particle Bombardment II (1983), Springer Verlag, Berlin 11
35. Papageorgopoulos A.C., and Kamaratos M. Surf. Rev. Lett. 8 (2001) 633
36. J. Brison, N. Mine, R.G. Vitchev, B. Douhard, L. Houssiau, Surf. Interface Anal., submitted for publication.
37. Kudriavtsev Y., Villegas A., Godines A., and Asomosa R. Appl. Surf. Sci. 239 (2005) 273
38. Brison J., and Houssiau L. Nucl. Instr. and Meth. B 259 (2007) 984
39. Yu M.L., and Lang N.D. Phys. Rev. Lett. 50 (1983) 127
40. Lang N.D. Phys. Rev. B 27 (1983) 2019
41. Norskov J.K., and Lundqvist B.I. Phys. Rev. B 19 (1979) 5661
42. Ishi S., and Ohmo Y. Surf. Sci. 159 (1985) 401
43. Malafsky G.P. J. Vac. Sci. Technol. A 11 (1993) 2158