Preparation of c-BN films by using a two-stage deposition process

Materials Letters

Volumn 43, Issue 3, 2000, Pages 148-152

  Zhang, Xingwang ^a,b,c   Yan, Hui ^a   Wang, Bo ^a   Chen, Guanghua ^a,b   Wong, S P ^c  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

^b LANZHOU UNIVERSITY   (China)

^c CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CUBIC BORON NITRIDE; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; NUCLEATION; SILICON; SPUTTER DEPOSITION; SUBSTRATES;

TWO-STAGE DEPOSITION PROCESS;

CERAMIC MATERIALS;

EID: 0033875627     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(99)00248-7     Document Type: Article

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