메뉴 건너뛰기




Volumn 14, Issue 6, 2006, Pages 2300-2308

Fabricating three dimensional nanostructures using two photon lithography in a single exposure step

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; OPTICAL RESOLVING POWER; OPTICS; PHOTONS;

EID: 33645067652     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.002300     Document Type: Article
Times cited : (117)

References (23)
  • 1
    • 0001298402 scopus 로고    scopus 로고
    • Two- And three-dimensional photonic crystals built with VLSI tools
    • S. Y. Lin, J. G. Fleming, and E. Chow, "Two- and three-dimensional photonic crystals built with VLSI tools," Mrs Bulletin 26, 627-631 (2001).
    • (2001) Mrs Bulletin , vol.26 , pp. 627-631
    • Lin, S.Y.1    Fleming, J.G.2    Chow, E.3
  • 3
    • 0034594907 scopus 로고    scopus 로고
    • Fabrication of photonic crystals for the visible spectrum by holographic lithography
    • M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, "Fabrication of photonic crystals for the visible spectrum by holographic lithography," Nature 404, 53-56 (2000).
    • (2000) Nature , vol.404 , pp. 53-56
    • Campbell, M.1    Sharp, D.N.2    Harrison, M.T.3    Denning, R.G.4    Turberfield, A.J.5
  • 4
    • 0032563228 scopus 로고    scopus 로고
    • Synthesis of macroporous minerals with highly ordered three-dimensional arrays of spheroidal voids
    • B. T. Holland, C. Blanford, and A. Stein, "Synthesis of macroporous minerals with highly ordered three-dimensional arrays of spheroidal voids," Science 281, 538-540 (1998).
    • (1998) Science , vol.281 , pp. 538-540
    • Holland, B.T.1    Blanford, C.2    Stein, A.3
  • 5
    • 0041421675 scopus 로고    scopus 로고
    • Fabrication of three-dimensional macroporous membranes with assemblies of microspheres as templates
    • S. H. Park and Y. Xia, "Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates," Chem. Mater. 10, 1745-1747 (1998).
    • (1998) Chem. Mater. , vol.10 , pp. 1745-1747
    • Park, S.H.1    Xia, Y.2
  • 6
    • 0030769045 scopus 로고    scopus 로고
    • Porous silica via colloidal crystallization
    • O. D. Velev, T. A. Jede, R. F. Lobo, and A. M. Lenhoff, "Porous silica via colloidal crystallization," Nature 389, 447-448 (1997).
    • (1997) Nature , vol.389 , pp. 447-448
    • Velev, O.D.1    Jede, T.A.2    Lobo, R.F.3    Lenhoff, A.M.4
  • 7
    • 0026107359 scopus 로고
    • Polymer-polymer phase behavior
    • F. S. Bates, "Polymer-polymer phase behavior," Science 251, 898-905 (1991).
    • (1991) Science , vol.251 , pp. 898-905
    • Bates, F.S.1
  • 10
    • 0041967046 scopus 로고    scopus 로고
    • A revolution in optical manipulation
    • D. G. Grier, "A revolution in optical manipulation," Nature 424, 810-816 (2003).
    • (2003) Nature , vol.424 , pp. 810-816
    • Grier, D.G.1
  • 11
    • 1642288753 scopus 로고    scopus 로고
    • Two-photon photopolymerization and 3D lithographic microfabrication
    • H.-B. Sun and S. Kawata, "Two-photon photopolymerization and 3D lithographic microfabrication," Adv. Polym. Sci. 170, 169-273 (2004).
    • (2004) Adv. Polym. Sci. , vol.170 , pp. 169-273
    • Sun, H.-B.1    Kawata, S.2
  • 12
    • 0040374492 scopus 로고    scopus 로고
    • Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals
    • T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. Lett. 79, 725-727 (2001).
    • (2001) Appl. Phys. Lett. , vol.79 , pp. 725-727
    • Kondo, T.1    Matsuo, S.2    Juodkazis, S.3    Misawa, H.4
  • 13
    • 4544383496 scopus 로고    scopus 로고
    • Three-dimensional nanofabrication with rubber stamps and conformable photomasks
    • S. Jeon, E. Menard, J.-U. Park, J. Maria, M. Meitl, J. Zaumseil, and J. A. Rogers, "Three-dimensional nanofabrication with rubber stamps and conformable photomasks," Adv. Mater. 16, 1369-1373 (2004).
    • (2004) Adv. Mater. , vol.16 , pp. 1369-1373
    • Jeon, S.1    Menard, E.2    Park, J.-U.3    Maria, J.4    Meitl, M.5    Zaumseil, J.6    Rogers, J.A.7
  • 15
    • 0033742531 scopus 로고    scopus 로고
    • Siloxane polymers for high-resolution, high-accuracy soft lithgraphy
    • H. Schmid and B. Michel, "Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithgraphy," Macromolecules 33, 3042-3049 (2000).
    • (2000) Macromolecules , vol.33 , pp. 3042-3049
    • Schmid, H.1    Michel, B.2
  • 20
    • 0000469932 scopus 로고    scopus 로고
    • Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures
    • G. Witzgall, R. Vrijen, E. Yablonovitch, V. Doan, and B. J. Schwartz, "Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures," Opt. Lett. 23, 1745-1747 (1998).
    • (1998) Opt. Lett. , vol.23 , pp. 1745-1747
    • Witzgall, G.1    Vrijen, R.2    Yablonovitch, E.3    Doan, V.4    Schwartz, B.J.5
  • 22
    • 0004084481 scopus 로고
    • John Wiley & Sons, INC., New York
    • M. V. Klein, Optics (John Wiley & Sons, INC., New York, 1970), pp. 415-481.
    • (1970) Optics , pp. 415-481
    • Klein, M.V.1
  • 23
    • 0029638654 scopus 로고
    • Subwavelength amorphous-silicon transmission gratings and applications in polarizers and waveplates
    • S. Y. Chou and W. Y. Deng, "Subwavelength Amorphous-Silicon Transmission Gratings And Applications In Polarizers And Waveplates," Appl. Phys. Lett. 67, 742-744 (1995).
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 742-744
    • Chou, S.Y.1    Deng, W.Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.