Fabrication of three-dimensional photonic crystals with multilayer photolithography

Optics Express

Volumn 13, Issue 7, 2005, Pages 2370-2376

  Yao, Peng ^a   Schneider, Garrett J ^a   Prather, Dennis W ^a   Wetzel, Eric D ^b   O'Brien, Daniel J ^b  

^a UNIVERSITY OF DELAWARE   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL STRUCTURE; CRYSTALS; INFILTRATION; MULTILAYERS; PHOTOLITHOGRAPHY; PHOTONS; PHOTORESISTS;

ENGINEERED DEFECTS; LATTICE ARRANGEMENTS; PHOTONIC CRYSTALS (PC); PLANAR LITHOGRAPHY;

THREE DIMENSIONAL;

EID: 21244449984     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.002370     Document Type: Article

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