Polymer-based membrane mirrors for micro-optical sensors

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 667-672

  Friese, Christoph ^a   Wissmann, Mark ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Adaptive optics; Electrostatic actuation; Micro mirror; Polymer; SU 8; Wave front formation

Indexed keywords

ADAPTIVE OPTICS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRODES; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MIRRORS; OPTIMIZATION; POLYMERIC MEMBRANES; POLYMERS; SILICON WAFERS; STICTION;

ELECTROSTATIC ACTUATION; MICRO-MIRRORS; PRESSURE SENSORS; SU-8; WAVE FRONT FORMATION;

OPTICAL SENSORS;

EID: 1542363512     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. G. Vdovin and P.M. Sarro, "Flexible mirror micromachined in silicon", Applied Optics Vol.34 No.16, 1995, pp. 2968-2972
3. E.H. Conradie and D.F. Moore, "SU-8 thick photoresist processing as a functional material for MEMS applications", J.Micromech. Microeng. 12, 2002, pp. 368-374
4. G. Vdovin, P.M. Sarro and S. Middelhoek, "Technology and applications of micromachined adaptive mirrors", J.Micromech.Microeng. 9, 1999, pp. R8-R20
5. S.P.Timoshenko, S.Woinowsky-Krieger, "Theory of plates and shells", Mc Craw-Hill, New York, 1959