A 3D tomographic EBSD analysis of a CVD diamond thin film

Science and Technology of Advanced Materials

Volumn 9, Issue 3, 2008, Pages

  Liu, Tao ^a   Raabe, Dierk ^a   Zaefferer, Stefan ^a  

^a MAX PLANCK INSTITUT FÜR EISENFORSCHUNG GMBH   (Germany)

Author keywords

3D EBSD; CVD diamond films; Dislocation density; FIB; Growth; Nucleation; Twinning

Indexed keywords

BACKSCATTERING; DIAMOND CUTTING TOOLS; DIAMOND FILMS; DIAMONDS; ELECTRON DIFFRACTION; FILM GROWTH; FOCUSED ION BEAMS; GROWTH (MATERIALS); NUCLEATION; THIN FILMS;

3D EBSD; CVD DIAMOND FILMS; DISLOCATION DENSITY; FIB; GROWTH;

CHEMICAL VAPOR DEPOSITION;

EID: 58149380929     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/9/3/035013     Document Type: Article

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