Large area high quality diamond film deposition by high power DC are plasma jet operating at gas recycling mode

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1551-1558

  Lu, F X ^a   Tang, W Z ^a   Huang, T B ^a   Liu, J M ^a   Song, J H ^a   Yu, W X ^a   Tong, Y M ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

DC are plasma jet; Gas recycling; Large area high quality diamond films

Indexed keywords

DIAMOND FILMS; FABRICATION; FLUID DYNAMICS; MAGNETIC FIELDS; OPTIMIZATION; PLASMA JETS; PLASMA TORCHES;

DIAMOND WAFERS;

DIAMONDS;

DIAMOND;

EID: 0035449303     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00407-1     Document Type: Article

References (12)

1. Arcjet synthesis of diamond