Zirconia-metal (Al, Y, Ti) oxide nanolaminate films

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 179-185

  Aita, C R ^a  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

Author keywords

Multilayer; Nanolaminate; Sputter deposition; Zirconia

Indexed keywords

NANOSTRUCTURED MATERIALS; SUPERPLASTICITY; THERMODYNAMICS;

INTERFACIAL ATOMIC REGISTRY; INTERFACIAL CATION MIXING; MULTILAYER NANOLAMINATE FILMS;

ZIRCONIA;

FILM;

EID: 14644405632     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.019     Document Type: Article

References (53)

1. D.J. Green R.H.J. Hannink R.H.J. M.V. Swain Transformation Toughening of Ceramics 1989 CRC Press Boca Raton 1
2. W.F. Gaertner E.E. Hoppe M.A. Omari R.S. Sorbello C.R. Aita J. Vac. Sci. Technol., A 22 2004 272
3. P. Yashar S.A. Barnett L. Hultman W.D. Sproul J. Mater. Res. 14 1999 3614
4. J.D. DeLoach C.R. Aita J. Mater. Sci. Lett. 19 2000 1123
5. I. Moriguchi Y. Tsujigo Y. Teraoka S. Kagawa J. Phys. Chem., B 104 2000 8101
6. X. Fu L.A. Clark Q. Yang M. Anderson Environ. Sci. Technol. 30 1996 647
7. A. Emeline G.V. Kataeva A.S. Litke A.V. Rudakova V.K. Ryabchuk N. Serpone Langmuir 14 1998 5011
8. A. Emeline G.N. Kuzmin D. Purevdorf V.K. Ryabchuk N. Serpone J. Phys. Chem., B 104 2002 2989
9. P. Iacconi D. Lapraz R. Caruba Phys. Statatus Solidi, A 50 1978 275
10. M.M. Mikhailov N.Y. Kuznetsov Inorg. Mater. 24 1998 656
11. C.R. Aita J.D. DeLoach R.S. Sorbello J. Appl. Phys. 94 2003 654
12. R. Ruh K.S. Mazdiyasni P.G. Valentine H.O. Bielstein J. Am. Ceram. Soc. 67 1984 C190
13. M.H. Tuilier J. Dexpert-Ghys H. Dexpert P. Lagarde J. Solid State Chem. 69 1987 153
14. C. Pascaul P. Duran J. Am. Ceram. Soc. 66 1982 23
15. H.G. Scott J. Mater. Sci. 12 1977 311
16. H.G. Scott Acta Crystallogr., B 33 1977 281
17. A.E. McHale R.S. Roth J. Am. Ceram. Soc. 66 1983 C-18
18. A.E. McHale R.S. Roth J. Am. Ceram. Soc. 69 1986 827
19. C.R. Aita, U.S. Patent No. 5472795, (1995).
20. C.M. Scanlan M. Gajdardziska-Josifovska C.R. Aita Appl. Phys. Lett. 64 1994 3548
21. C.R. Aita M.D. Wiggins R. Whig C.M. Scanlan M. Gajdardziska-Josifovska J. Appl. Phys. 79 1996 1176
22. M.A. Schofield M. Gajdardziska-Josifovska C.R. Aita P.M. Rice Thin Solid Films 326 1998 106-116
23. C.R. Aita E.E. Hoppe R.S. Sorbello Appl. Phys. Lett. 82 2003 677
24. M. Gajdardziska-Josifovska C.R. Aita J. Appl. Phys. 79 1996 1315
25. M.A. Schofield M. Gajdardziska-Josifovska C.R. Aita P.M. Rice Thin Solid Films 326 1998 117-125
26. C.R. Aita Crit. Rev. Solid State Mater. Sci. 23 1998 205
27. C.R. Aita Surf. Eng. 14 1998 421
28. C.R. Aita J.D. DeLoach V.V. Yakovlev Appl. Phys. Lett. 81 2002 238
29. J.D. DeLoach C.R. Aita C.-K. Loong J. Vac. Sci. Technol., A 20 2002 151
30. J.D. DeLoach J.J. Shibilski C.R. Crape C.R. Aita J. Vac. Sci. Technol., A 18 2000 2922
31. E. Bauer in: M.H. Francombe H. Sato (eds.) Single Crystal Films 1964 MacMillan New York 43
32. L.V. Azaroff Elements of X-ray Crystallography 1968 McGraw-Hill New York 193
33. N. Dubrovinskaia L.S. Dubrovinsky R. Ahuja V.B. Prokopenko V. Dmitriev H.-P. Weber J.M. Osorio-Guillen B. Johansson Phys. Rev. Lett. 87 2001 275501
34. A. El Goresy M. Chen L. Dubrovinsky P. Gillet G. Graup Science 293 2001 1467
35. R.W. Lynch B. Morosin J. Am. Chem. Soc. 55 1972 410
36. H. Arashi T. Yagi S. Akimoto Y. Kudoh Phys. Rev., B 41 1990 4309
37. M.A. Krebs R.A. Condrate Sr. J. Mater. Sci. Lett. 7 1988 1327
38. A.A. Zhilin V.I. Petrov M.Ya. Tsenter T.I. Chuavaeva Opt. Spectrosc. 73 1992 684
39. F. Azough R. Freer J. Petzelt J. Mater. Sci. 28 1993 2273
40. Y.K. Kim H.M. Jang J. Appl. Phys. 89 2001 6349
41. H.-R. Chen J.-L. Shi W.-H. Zhang M.-L. Ruan D.-S. Yan Chem. Mater. 13 2001 1035
42. K. Tanabe T. Sumiyoshi K. Shibata T. Kiyoura J. Kitagawa Bull. Chem. Soc. Jpn. 47 1974 1064
43. H.H. Kung J. Solid State Chem. 52 1984 191
44. K.N. Tu J.W. Mayer L.C. Feldman Electronic Thin Film Science for Electrical Engineers and Materials Scientists 1992 Macmillan New York 103
45. H. Shin M. Agarwal M.R. De Guire A.H. Heuer J. Am. Ceram. Soc. 79 1996 1975
46. U. Gosele K.N. Tu J. Appl. Phys. 53 1989 852
47. F.M. d'Heurle J. Mater. Res. 3 1988 167
48. N. Sonnenberg A.S. Longo M.J. Cima B.P. Chang K.G. Ressler P.C. McIntyre Y.P. Liu J. Appl. Phys. 74 1993 1030
49. P.C. McIntyre K.G. Ressler N. Sonnenberg M.J. Cima J. Vac. Sci. Technol., A 14 1996 210
50. W.D. Kingery H.K. Bowen D.R. Uhlmann Introduction to Ceramics vol. 727 1976 Wiley-Interscience New York 714
51. S.C. Moulzolf Y. Yu D.J. Frankel R.J. Lad J. Vac. Sci. Technol., A 15 1997 1211
52. S.C. Moulzolf R.J. Lad R.J. Blau Thin Solid Films 347 2000 220
53. S.C. Moulzolf R.J. Lad J. Mater. Res. 15 2000 369