Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

Applied Surface Science

Volumn 255, Issue 6, 2009, Pages 3544-3547

  Yang, Tianlin ^a,b   Zhang, Zhisheng ^a   Li, Yanhui ^b   Lv, MaoShui ^b   Song, Shumei ^b   Wu, Zhongchen ^b   Yan, Jincheng ^b   Han, Shenghao ^b  

^a TIANJIN UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

Optical band gap; rf magnetron sputtering; Zinc nitride

Indexed keywords

ENERGY GAP; FILM PREPARATION; MAGNETRON SPUTTERING; NITRIDES; OPTICAL BAND GAPS; OPTICAL PROPERTIES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC COMPOUNDS;

DIRECT BAND GAP; PREFERRED ORIENTATIONS; QUARTZ SUBSTRATE; RF-MAGNETRON SPUTTERING; STRUCTURAL AND OPTICAL PROPERTIES; TRANSMITTANCE SPECTRA; ZINC NITRIDE FILMS; ZINC NITRIDES;

OPTICAL FILMS;

EID: 57849137563     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.07.210     Document Type: Article

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