-
1
-
-
0032022676
-
-
G. Schriever, S. Mager, A. Naweed, A. Engel, K. Bergmann, and R. Lebert, Applied Optics 37, 1243 (1998).
-
(1998)
Applied Optics
, vol.37
, pp. 1243
-
-
Schriever, G.1
Mager, S.2
Naweed, A.3
Engel, A.4
Bergmann, K.5
Lebert, R.6
-
4
-
-
85163228531
-
-
J. Jonkers, Plasma Sources Sei. Technol. 15, S8-S16 (2006).
-
J. Jonkers, Plasma Sources Sei. Technol. 15, S8-S16 (2006).
-
-
-
-
5
-
-
33947391276
-
-
S.A. George, W.T. Silfvast, K. Takenoshita, R.T. Bernath, C. S. Koay, G. Shimkaveg, and M.C. Richardson, Optics Letters 32, 997-999 (2007).
-
(2007)
Optics Letters
, vol.32
, pp. 997-999
-
-
George, S.A.1
Silfvast, W.T.2
Takenoshita, K.3
Bernath, R.T.4
Koay, C.S.5
Shimkaveg, G.6
Richardson, M.C.7
-
6
-
-
34247195637
-
-
A. Nagano, T. Inoue, P.E. Nica, S. Amano, S. Miyamoto, and T. Mochizuki, Appl. Phys. Lett. 90, 151502 (2007).
-
(2007)
Appl. Phys. Lett
, vol.90
, pp. 151502
-
-
Nagano, A.1
Inoue, T.2
Nica, P.E.3
Amano, S.4
Miyamoto, S.5
Mochizuki, T.6
-
7
-
-
51349147516
-
-
A. Nagano, T. Mochizuki, S. Miyamoto, and S. Amano, Appl. Phys. Lett. 93, 091502 (2008).
-
(2008)
Appl. Phys. Lett
, vol.93
, pp. 091502
-
-
Nagano, A.1
Mochizuki, T.2
Miyamoto, S.3
Amano, S.4
-
8
-
-
85163223958
-
-
I.V. Fomenkov, W.N. Partió, N.R. Böwering, A.I. Ershov, C.L. Rettig, R.M. Ness, I.R. Oliver, S.T. Melnychuk, O. V. Khodykin, J.R. Hoffman, V.B. Fleurov, J.M. Algots, J.W. Viatella, B.A.M. Hansson, O. Hemberg, A.N. Bykanov, E. A. Lopez, R C Oh, T. D. Steiger, and D. W. Myers, Progress in development of a high power source for EUV lithography, 2004, presented at the Symposium, on EUVL (Miyasaki, Japan).
-
I.V. Fomenkov, W.N. Partió, N.R. Böwering, A.I. Ershov, C.L. Rettig, R.M. Ness, I.R. Oliver, S.T. Melnychuk, O. V. Khodykin, J.R. Hoffman, V.B. Fleurov, J.M. Algots, J.W. Viatella, B.A.M. Hansson, O. Hemberg, A.N. Bykanov, E. A. Lopez, R C Oh, T. D. Steiger, and D. W. Myers, Progress in development of a high power source for EUV lithography, 2004, presented at the Symposium, on EUVL (Miyasaki, Japan).
-
-
-
-
9
-
-
38149124879
-
-
M. Masnavi, M. Nakajima, E. Hotta, and K. Horioka, J. Appl. Phys. 103, 013303 (2008).
-
(2008)
J. Appl. Phys
, vol.103
, pp. 013303
-
-
Masnavi, M.1
Nakajima, M.2
Hotta, E.3
Horioka, K.4
-
11
-
-
0041773571
-
-
G. Jamelot, P. Jaegle, P. Lemaire, and A. Carillon, J. Quant. Spectrosc. Radiât. Transfer 44, 71 (1990).
-
(1990)
J. Quant. Spectrosc. Radiât. Transfer
, vol.44
, pp. 71
-
-
Jamelot, G.1
Jaegle, P.2
Lemaire, P.3
Carillon, A.4
-
12
-
-
85163235471
-
-
W. Lochte-Holtgreven, Plasma diagnostics (AIP Press, New York, 1995), originally published in 1968.
-
W. Lochte-Holtgreven, Plasma diagnostics (AIP Press, New York, 1995), originally published in 1968.
-
-
-
-
15
-
-
85163233998
-
-
H. A. Lorentz, Proc. R. Acad. Sci. 8, 591 (1906).
-
H. A. Lorentz, Proc. R. Acad. Sci. 8, 591 (1906).
-
-
-
-
20
-
-
0001276910
-
-
B. Talin, A. Calisti, L. Godbert, R. Stamm, R. Lee, and L. Klein, Phys. Rev. A 51, 1918-1928 (1995).
-
(1995)
Phys. Rev. A
, vol.51
, pp. 1918-1928
-
-
Talin, B.1
Calisti, A.2
Godbert, L.3
Stamm, R.4
Lee, R.5
Klein, L.6
-
22
-
-
0003570228
-
-
Akademie-Verlag Berlin, Berlin
-
W. D. Kraeft, D. Kremp, W. Ebeling, and G. Röpke, Quantum Statistics of Charged Particle Systems (Akademie-Verlag Berlin, Berlin, 1986).
-
(1986)
Quantum Statistics of Charged Particle Systems
-
-
Kraeft, W.D.1
Kremp, D.2
Ebeling, W.3
Röpke, G.4
-
24
-
-
0034247771
-
-
S. Sorge, A. Wierling, G. Röpke, W. Theobald, R. Sauerbrey, and T. Wilhein, J. Phys. B: At. Mol. Opt. Phys. 33, 2983-3000 (2000).
-
(2000)
J. Phys. B: At. Mol. Opt. Phys
, vol.33
, pp. 2983-3000
-
-
Sorge, S.1
Wierling, A.2
Röpke, G.3
Theobald, W.4
Sauerbrey, R.5
Wilhein, T.6
-
25
-
-
85163230697
-
-
B. Omar, A. Wierling, S. Günter, and G. Röpke, J. Phys. Conf. Series 11, 147 (2005).
-
B. Omar, A. Wierling, S. Günter, and G. Röpke, J. Phys. Conf. Series 11, 147 (2005).
-
-
-
-
30
-
-
33746660801
-
-
P.E. Nica, S. Miyamoto, S. Amano, T. Inoue, A. Shimoura, K. Kaku, and T. Mochizuki, Appl. Phys. Lett. 89, 41501 (2006).
-
(2006)
Appl. Phys. Lett
, vol.89
, pp. 41501
-
-
Nica, P.E.1
Miyamoto, S.2
Amano, S.3
Inoue, T.4
Shimoura, A.5
Kaku, K.6
Mochizuki, T.7
-
31
-
-
34848831758
-
-
R Nica, S. Miyamoto, S. Amano, T. Inoue, A. Shimoura, and T. Mochizuki, Phys. Lett. A 370, 154-157 (2007).
-
(2007)
Phys. Lett. A
, vol.370
, pp. 154-157
-
-
Nica, R.1
Miyamoto, S.2
Amano, S.3
Inoue, T.4
Shimoura, A.5
Mochizuki, T.6
-
32
-
-
33745628311
-
-
S.A. George, W. Silfvast, K. Takenoshita, R. Bernath, C. S. Koay, G. Shimkaveg, and M. Richardson, Proc. SPIE. 6151, 615143 (2006).
-
(2006)
Proc. SPIE
, vol.6151
, pp. 615143
-
-
George, S.A.1
Silfvast, W.2
Takenoshita, K.3
Bernath, R.4
Koay, C.S.5
Shimkaveg, G.6
Richardson, M.7
-
33
-
-
85163223798
-
-
private communication
-
S. A. George (2008), private communication.
-
(2008)
-
-
George, S.A.1
-
43
-
-
0001420835
-
-
C. Iglesias, H. DeWitt, J. Lebowitz, D. MacGowan, and W. Hubbard, Phys. Rev. A 31, 1698-1702 (1985).
-
(1985)
Phys. Rev. A
, vol.31
, pp. 1698-1702
-
-
Iglesias, C.1
DeWitt, H.2
Lebowitz, J.3
MacGowan, D.4
Hubbard, W.5
-
47
-
-
5844389345
-
-
J. Seidel, Z. Naturf. 32a, 1195 (1977).
-
(1977)
Z. Naturf
, vol.32 a
, pp. 1195
-
-
Seidel, J.1
-
48
-
-
0001148031
-
-
Y. Leng, J. Goldhar, H. Griem, and R. Lee, Phys. Rev. E 52, 4328-4337 (1995).
-
(1995)
Phys. Rev. E
, vol.52
, pp. 4328-4337
-
-
Leng, Y.1
Goldhar, J.2
Griem, H.3
Lee, R.4
-
49
-
-
78650942899
-
-
J. P. Apruzese, J. Davis, K. G. Whitney, J. W. Thornhill, P. C. Kepple, and R. W. Clark, Phys. Plasmas 9, 2411 (2002).
-
(2002)
Phys. Plasmas
, vol.9
, pp. 2411
-
-
Apruzese, J.P.1
Davis, J.2
Whitney, K.G.3
Thornhill, J.W.4
Kepple, P.C.5
Clark, R.W.6
|