EUV generation from lithium laser plasma for lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  George, Simi A ^a   Silfvast, William ^a   Takenoshita, Kazutoshi ^a   Bemath, Robert ^a   Koay, Chiew Seng ^a   Shimkaveg, Greg ^a   Richardson, Martin ^a   Al Rabban, Moza ^b   Scott, Howard ^c  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b QATAR UNIVERSITY   (Qatar)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

EUV lithography; EUV sources; EUV spectroscopy; Laser plasmas; Lithium; Tin

Indexed keywords

EUV LITHOGRAPHY; EUV SOURCES; EUV SPECTROSCOPY; LASER PLASMAS;

IRRADIATION; LIGHT EMISSION; LITHIUM; LITHOGRAPHY; THERMAL EFFECTS; TIN;

LASER PRODUCED PLASMAS;

EID: 33745628311     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.660584     Document Type: Conference Paper

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