-
1
-
-
0000130079
-
-
C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
-
(1998)
J. Vac. Sci. Technol. B
, vol.16
, pp. 3142
-
-
Gwyn, C.W.1
Stulen, R.2
Sweeney, D.3
Attwood, D.4
-
3
-
-
24644440326
-
EUV source requirements
-
presented at the, Miyazaki, Japan, November 5
-
K. Ota, Y. Watanabe, H. Franken, and V. Banine, "EUV source requirements," presented at the EUV Source Workshop, Third International EUVL Symposium, Miyazaki, Japan, November 5, 2004.
-
(2004)
EUV Source Workshop, Third International EUVL Symposium
-
-
Ota, K.1
Watanabe, Y.2
Franken, H.3
Banine, V.4
-
6
-
-
24644489086
-
-
C.-S. Koay, S. George, K. Takenoshita, R. Bernath, E. Fujiwara, M. C. Richardson, and V. Bakshi, Proc. SPIE 5751, 279 (2005).
-
(2005)
Proc. SPIE
, vol.5751
, pp. 279
-
-
Koay, C.-S.1
George, S.2
Takenoshita, K.3
Bernath, R.4
Fujiwara, E.5
Richardson, M.C.6
Bakshi, V.7
-
7
-
-
0038203233
-
Characterization of a lithium laser produced plasma at 135 Å for extreme ultraviolet projection lithography,
-
M.S. thesis University of Central Florida
-
D. J. O'Connell, "Characterization of a lithium laser produced plasma at 135 Å for extreme ultraviolet projection lithography," M.S. thesis (University of Central Florida, 1994).
-
(1994)
-
-
O'Connell, D.J.1
-
8
-
-
33947361238
-
Progress in development of a high power source for EUV lithography
-
presented at the, Japan, November 1-5
-
I. V. Fomenkov, W. N. Partlo, N. R. Böwering, A. I. Ershov, C L. Rettig, R. M. Ness, I. R. Oliver, S. T. Melnychuk, O. V. Khodykin, J. R. Hoffman, V. B. Fleurov, J. M. Algots, J. W. Viatella, B. A. M. Hansson, O. Hemberg, A. N. Bykanov, E. A. Lopez, P. C. Oh, T. D. Steiger, and D. W. Myers, "Progress in development of a high power source for EUV lithography," presented at the Symposium on EUVL (Miyasaki, Japan), November 1-5, 2004.
-
(2004)
Symposium on EUVL (Miyasaki
-
-
Fomenkov, I.V.1
Partlo, W.N.2
Böwering, N.R.3
Ershov, A.I.4
Rettig, C.L.5
Ness, R.M.6
Oliver, I.R.7
Melnychuk, S.T.8
Khodykin, O.V.9
Hoffman, J.R.10
Fleurov, V.B.11
Algots, J.M.12
Viatella, J.W.13
Hansson, B.A.M.14
Hemberg, O.15
Bykanov, A.N.16
Lopez, E.A.17
Oh, P.C.18
Steiger, T.D.19
Myers, D.W.20
more..
-
9
-
-
33947434572
-
The optimal path to HVM
-
presented at the, Japan, November 1-5
-
D. Myers, B. Klene, I. Fomenkov, B. Hansson, and B. Bolloger, "The optimal path to HVM," presented at the Symposium on EUVL (Miyasaki, Japan), November 1-5, 2004.
-
(2004)
Symposium on EUVL (Miyasaki
-
-
Myers, D.1
Klene, B.2
Fomenkov, I.3
Hansson, B.4
Bolloger, B.5
-
10
-
-
84894001881
-
-
FC2: Calibration of a EUV Source at PLEX LLC (International SEMATECH Technology Transfer no. 04024490A-TR).
-
"FC2: Calibration of a EUV Source at PLEX LLC" (International SEMATECH Technology Transfer no. 04024490A-TR).
-
-
-
-
11
-
-
0037063849
-
-
R. Stuik, F. Scholze, J. Tummler, and F. Bijkerk, Nucl. Instrum. Methods Phys. Res. A 429, 305 (2002).
-
(2002)
Nucl. Instrum. Methods Phys. Res. A
, vol.429
, pp. 305
-
-
Stuik, R.1
Scholze, F.2
Tummler, J.3
Bijkerk, F.4
-
13
-
-
84975635954
-
-
T. Kita, T. Harada, N. Takano, and H. Kuroda, Appl. Opt. 22, 512 (1983).
-
(1983)
Appl. Opt
, vol.22
, pp. 512
-
-
Kita, T.1
Harada, T.2
Takano, N.3
Kuroda, H.4
-
14
-
-
84894002520
-
-
S. A. George, W. Silfvast, K. Takenoshita, R. Bernath, C.-S. Koay, G. Shimkaveg, M. Al-Rabban, H. Scott, and M. Richardson, Proc. SPIE 6151 (2006).
-
(2006)
Proc. SPIE
, vol.6151
-
-
George, S.A.1
Silfvast, W.2
Takenoshita, K.3
Bernath, R.4
Koay, C.-S.5
Shimkaveg, G.6
Al-Rabban, M.7
Scott, H.8
Richardson, M.9
-
18
-
-
24644446384
-
-
S. George, C.-S. Koay, K. Takenoshita, R. Bernath, M. Al-Rabban, C. Keyser, H. Scott, V. Bakshi, and M. C. Richardson, Proc. SPIE 5751, 779 (2005).
-
(2005)
Proc. SPIE
, vol.5751
, pp. 779
-
-
George, S.1
Koay, C.-S.2
Takenoshita, K.3
Bernath, R.4
Al-Rabban, M.5
Keyser, C.6
Scott, H.7
Bakshi, V.8
Richardson, M.C.9
-
19
-
-
24644498105
-
-
M. Al-Rabban, C. Keyser, S. George, H. Scott, V. Bakshi, and M. C. Richardson, Proc. SPIE 5751, 769 (2005).
-
(2005)
Proc. SPIE
, vol.5751
, pp. 769
-
-
Al-Rabban, M.1
Keyser, C.2
George, S.3
Scott, H.4
Bakshi, V.5
Richardson, M.C.6
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