Chemical vapor deposition of metal borides: 6. the formation of neodymium boride thin film materials from polyhedral boron clusters and metal halides by chemical vapor deposition

Applied Organometallic Chemistry

Volumn 22, Issue 6, 2008, Pages 300-307

  Kher, Shreyas S ^a   Romero, Jennifer V ^a   Caruso, John D ^a   Spencer, James T ^a  

^a SYRACUSE UNIVERSITY   (United States)

Author keywords

Chemical vapor deposition; Cobalt boride; Metal boride; Neodymium boride

Indexed keywords

ATOMIC SPECTROSCOPY; BORON; COBALT; CRYSTALLINE MATERIALS; ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVES; EMISSION SPECTROSCOPY; FILMS; GLOW DISCHARGES; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; MASS SPECTROMETRY; MOLECULAR SPECTROSCOPY; NEODYMIUM; SPECTRUM ANALYSIS; THICK FILMS; THIN FILMS; TRANSITION METALS; VAPOR DEPOSITION; VAPORS;

BORON CLUSTERS; BULK MATERIALS; COBALT BORIDE; CRYSTALLINE THIN FILMS; CVD PRECURSORS; DECABORANE; DIFFERENT SUBSTRATES; FILM MATERIALS; GLOW DISCHARGE MASS SPECTROMETRY.; HEXABORIDE; IN COMPOSITIONS; METAL HALIDES; MODERATE TEMPERATURES; NEODYMIUM BORIDE; NEODYMIUM BORIDES; POLYCRYSTALLINE FILMS; X-RAY DIFFRACTIONS;

BORIDES;

EID: 57249105546     PISSN: 02682605     EISSN: 10990739     Source Type: Journal    
DOI: 10.1002/aoc.1383     Document Type: Article

References (102)

1. S. S. Kher, Y. Tan, J. T. Spencer, Appl. Organomet. Chem. 1996, 9, 297;
2. b) J. A. Glass, Jr., S.-D. Hwang, S. Datta, B. Robertson, J. T. Spencer, J. Phys. Chem. Solids 1996, 57, 563.
3. R. Thompson, Prog. Boron Chem. 1970, 2, 173;
4. b) J. M. Lafferty, J. Appl. Phys. 1951. 22, 299;
5. c) X. Zhao, X. Liu, F. Lin, W. Liu, W. Su, J. Alloys. Comp. 1997, 249, 247;
6. d) E. A. Kafadaryan, S. I. Petrosyan, G. R. Badalyan, S. R. Harutunyan, A. S. Kuzanyan, Thin Solid Films 2002, 416, 218.
7. (a) R.W.Johnson, A. H. Daane, J. Phys. Chem. 1961. 65, 909;
8. b) J.Stankiewicz, S. Nakatsuji, Z. Fisk, Phys. Rev. B 2005, 71, 134 426;
9. c) M. Sera, S. Kobayashi, M. Hiroi, N. Kobayashi, S. Kunii, Phys. Rev. B. 1996 54, 5207;
10. d) E. F. Westrum, Jr., J. T. S. Andrews, B. H. Justice, D. A. Johnson, J. Chem. Thermodynamics 2002, 34, 239;
11. e) M. Reiffers, J. Sebek, E. Santava, N. Shitsevalova, S. Gabani, G. Pristas, K. Flachbart, J. Magn. Magn. Mater. 2007 310, e595;
12. f) S. Otani, H. Nakagawa, Y. Nishi, N. Kieda, J. Solid State Chem. 2000, 154, 238.
13. D. M. P. Mingos. In Inorganometallic Chemistry (Ed.: T. P. Fehlner). Plenum: New York, 1992.
14. W. N. Lipscomb, W. Britton, J. Chem. Phys. 1960, 33, 275;
15. b) H.C. Longuet-Higgins, M. De V. Roberts, Proc. Royal. Soc. 1954 A224, 336;
16. c) H. C. Longuet-Higgins, M. De V. Roberts, Proc. R. Soc. 1954, 230, 110;
17. d) R. W. Johnson, A. H. Daane, J. Phys. Chem. 1963, 38, 425;
18. e) A. H. Silver, P. B. Bray, J. Chem. Phys. 1960, 32, 288;
19. f) J. M. Lafferty, J. Appl. Phys. 1951, 22, 299.
20. R. M. Minyaev, R. Hoffmann, Chem. Mater. 1991, 3, 547.
21. M. Belyansky, M. Trenary, Chem. Mater. 1997, 9, 403.
22. P. Schwarzkopf, R. Kieffer, W. Leszynski, K. Benesovsky, Refractory Hard Metals, Borides, Carbides, Nitrides, and Silicates, Macmillan Company: New York, 1953;
23. b) B. Aronsson, T. Lundström, S. Rundqvist, Borides, Silicides and Phosphides, Wiley: New York, 1965;
24. c) W. B. Pearson, Crystal Chemistry and Physics of Metals and Alloys, Wiley: New York, 1964;
25. d) A. F. Wells, Structural Inorganic Chemistry, Clarendon Press: Oxford, 1975;
26. e) W. N. Lipscomb, J. Less-Common Met. 1981; 82, 1;
27. f) P. Villars, L D. Carvert, Pearson's Handbook ofCrystallographic Data forlntermetallic Phases, American Society for Metals, vol. 2, Metals Park, OH, 1985;
28. g) G. V. Samsonov, L Ya. Markovski, A. F. Zhigach, M. B. Valyashko, Boron, its Compounds and Alloys, AN Ukr. SSR Publishers: Kiev, 1960;
29. h) R. M. Adams, (Ed.). Boron, Metallo-boron Compounds and Boranes, Interscience: New York, 1972;
30. i) V. I. Matkovich, (Ed.). Boron and Refractory Borides, Springer: New York, 1977;
31. j) G. V. Samsonov, Yu. M. Goryachev, B. A. Kovenskaya, J. Less-Common Met. 1976; 47, 147;
32. k) Yu. B. Kuz'ma, Crystallography of Borides, L'vov University Publishers: L'vov, 1983;
33. B. G. Hyde, S. Andersson, Inorganic Crystal Structures, Wiley: New York, 1989 .
34. N. N. Greenwood, A. Earnshaw, Chemistry of The Elements, Pergamon Press: Oxford, 1985;
35. b) Powder Diffraction File, International Center for Diffraction Data, Swarthmore, PA, JCPDS file no. 24-1458.
36. Yu. B. Paderno, V. S. Fomenko, G. V. Samsonov, Ukrain. Khim. Zhur. 1960, 26, 409;
37. b) K. I. Portnoi, V. A. Timofeev, E. N. Timofeeva, Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy 1965, 1, 1513.
38. J.T. Spencer, Prog. Inorg. Chem. 1994, 41, 145.
39. P. A. Dowben, J. T. Spencer, G. T. Stauf, Mat. Sci. Engng B 1989, B2, 297;
40. b) M. R. Leys, Chemtronics 1987, 2, 155;
41. c) G. J. Davies, D. A. Andrews, Chemtronics 1988, 3, 3;
42. d) A. C. Jones, J. S. Roberts, P. J. Wright, P. E. Oliver, B. Cockayne, Chemtronics 1988, 3, 152.
43. M. M. Amini, T.P. Fehlner, G. J. Long, M. Politowski, Chem. Mater. 1990, 2, 432;
44. b) B. H. S. Thimmappa, T. P. Fehlner, G. J. Long, O. A. Pringle, Chem. Mater. 1991, 3, 1148;
45. c) C. S. Jun, T. P. Fehlner, G. J. Long, Chem. Mater. 1992, 4, 440.
46. J. A. Jensen, J. E. Gozum, D. M. Pollina, G. S. Girolami, J. Am. Chem. Soc. 1998, 110, 1643;
47. b) N. Kumar, Y. Yang, W. Noh, G. S. Girolami, J. R. Abelson, Chem. Mater. 2007, 19, 3802;
48. c) J. A. Jensen, G. S. Girolami, Inorg. Chem. 1989, 28,2107;
49. d) Y. Yang, S. Jayaraman, B. Sperling, D. Y. Kim, G. S. Girolami, J. R. Abelson, J. Vac.Sci. Technol. A 2007, 25, 200;
50. e) S. Jayaraman, J. E. Gerbi, Y. Yang, D. Y. Kim, A. Chatterjee, P. Bellon, G. S. Girolami, J. P. Chevalier, J. R. Abelson, Surf. Coat. Technol. 2006, 200, 6629;
51. f) Y. Yang, S. Jayaraman, D. Y. Kim, G. S. Girolami, J. R. Abelson, J. Cryst. Growth 2006 294, 389;
52. g) Y. Yang, S. Jayaraman, D. Y. Kim, G. S. Girolami, J. R. Abelson, Chem. Mater. 2006, 18, 5088.
53. R. N. Grimes, in Wilkinson G, Stone FGA, Abel E (Eds). Comprehensive Organometallic Chemistry. Pergamon: Oxford, 1982.
54. H. Itoh, Y. Tsuzuki, T. Yogo, S. Naka, Mater. Res. Bull. 1987, 22, 1259.
55. D. M. Goedde, G. K. Windier, G. S. Girolami, Inorg. Chem. 2007, 46, 2814;
56. b) D. M. Goedde, G. S. Girolami, J Am. Chem. Soc. 2004, 126, 12230;
57. c) S. Jayaraman, E. J. Klein, Y. Yang, D. Y. Kim, G. S. Girolami, J. R. Abelson, J. Vac. Sci. Technol. 2005, A 23, 631.
58. E. J. Marks, J. R. Kolb, Chem. Rev. 1977, 77, 263.
59. H.O. Pierson, E. Randich, D. M. J. Mattox, J. Less-Common Met. 1979, 67, 381;
60. b) H. O. Pierson, E. Randich, Thin Solid Films 1978, 54, 119;
61. c) H. O. Pierson, A. W. Mullendore, Thin Solid Films 1982, 95, 99;
62. d) A. J. Caputo, W. J. Lackey, I. G. Wright, P.J. Angelini, J. Electrochem. Soc. 1985 132, 2274;
63. e) J. Bouix, H. Vincent, M. Boubehira, J. C. Viala, J. Less-Common. Met. 1986, 117, 83;
64. f) T.Takahashi, H.J. Kamiya, Cryst. Growth 1974, 26, 203;
65. g) T.M. Besmann, T. E. Spear, J. Electrochem. Soc. 1977, 124, 786;
66. h)T. M. Besmann, K. E. Spear, J. Cryst. Growth 1975, 31, 60;
67. i) H. O. Pierson, A. W. Mullendore, Thin Solid Films 1980, 72, 511.
68. J. A. Glass, Jr., S. S. Kher, J. T. Spencer, Thin Solid Films 1992, 207, 15.
69. J. A. Glass, Jr., S. S. Kher, J. T. Spencer, Chem. Mater. 1992, 4, 530.
70. E. Zange, Chem. Ber. 1960, 93, 652.
71. Q. Ding, Y. Zhao, J. Xu, C. Zou, Solid State Commun. 2007, 141, 53;
72. b) Y. Liu, W.J. Lu, J. N. Qin, D. Zhang, J. Alloys Compd 2007, 43 J, 337.
73. I. Goscianska, T. Tolinski, B. Szymanski, A. Kowalczyk, Czech. J. Phys. 2005, 54, D241.
74. S. S. Kher, J. T. Spencer, Chem. Mater. 1992, 4, 538.
75. D. F. Shriver, M. A. Drezdzon, The Manipulation of Air-Sensitive Compounds, Wiley-Interscience: New York, 1986.
76. H. E. Wirth, E. D. Palmer, J. Phys. Chem. 1956; 60, 914;
77. b) D.T. Hurd, M. M. Safford, US Patent no. 2,588,559. 26 June 1954;
78. c) M. M. Safford, D. T. Hurd, U. S. Patent no. 2,558,56., 26 June 1954.
79. E. L. Muetterties, Boron Hydride Chemistry. Academic Press: New York. 1975;
80. b) W. N. Lipscomb, Boron Hydrides. Benjamin: New York, 1963;
81. c) T. Onak, Comprehensive Organometallic Chemistry (Eds.: G. Wilkinson, F. G. A. Stone, E. Abel), Pergamon: Oxford, 1982.
82. G. Balakrishnan, M. R. Lees, D. M. K. Paul, J. Magn, Magn. Mater. 2004, 272 276, 601.
83. Q. Jang, R. LaFerla, R. B. Kaplan, B. S. Ahern, D. W. Weyburn, 5th Int. SAMPE Conference 1991, 468;
84. b). A. Hagimura, A. Kato, Nippon Kagaku Kaishi 1980, 7, 1108.
85. J. A. Bearden, Rev. Mod. phys. 1967, 39, 78.
86. S. S. Kher, J. T. Spencer, J. Phys. Chem. Solids 1998, 59, 1343;
87. b) R. C. Schoonmaker, A. H. Friedman, R. F. Porter, J. Chem. Phys. 1959, 31, 1586;
88. c) J. D. McKinley, J. Chem. Phys. 1964, 40, 120;
89. c) K. R. More, Phys. Rev. 1938, 54, 122;
90. d) S. B. Rao, V. V. Dadape, High Temp. Sci. 1971, 3, 1;
91. e) Gmelin Handbook 1966, 57, 548;
92. f) C. Hirayama, P. M. Castle, W. E. Snider, R. L. Kleinosky, J. Less-Common Met. 1978, 57, 69;
93. g) R. C. Schoonmaker, R. F. Porter, J. Chem. Phys. 1958, 29, 116.
94. Powder Diffraction File, International Center for Diffraction Data, Swarthmore, PA, JCPDS file no. 3-065-5421.
95. S. Ciach, A. J. C. Nicholson, D. L. Swingler, P. J. Thistlethwaite, Inorg. Chem. 1973, 12, 2072.
96. A. Morisako, X. Liu, J. Magn, Magn. Mater. 2006, 304, 46;
97. b) C. B. Shoemaker, D. P. Shoemaker, R. Fruchart, Acta Crystallogr. 1984, C40, 1665;
98. c) Y. Chen, X. Li, X. L. Chen, J. K. Liang, G. H. Rao, Q. L. Liu, J. Alloys Compds 2006, 305, 216;
99. d) N. A. El Masry, H. H. Stadelmaier, J. Less-Common Met. 1984, 96, 165;
100. e) H. Saito, M. Takahashi, T. Wakiyama, IEEE Trans. Magnetics MAG-22 1986, 1087;
101. f) H. Ido, O. Nashima, T. Takahashi, K. Oda, K. Sugiyama, J. Appl. Phys. 1994, 76, 6165.
102. Powder Diffraction File, international Center for Diffraction Data, Swarthmore, PA, JCPDS file no. 3-0959.