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Volumn 104, Issue 10, 2008, Pages

Nanomechanical properties of piezoresistive cantilevers: Theory and experiment

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; RESONANCE;

EID: 57049153447     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3018944     Document Type: Article
Times cited : (6)

References (21)
  • 3
    • 0026372168 scopus 로고
    • Digest of Technical Papers, International Conference on Transducers, IEEE Solid State Sensors and Actuators, (unpublished).
    • M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, Digest of Technical Papers, International Conference on Transducers, IEEE Solid State Sensors and Actuators, 1991 (unpublished), 448-451.
    • (1991) , pp. 448-451
    • Tortonese, M.1    Yamada, H.2    Barrett, R.C.3    Quate, C.F.4
  • 21
    • 0032109073 scopus 로고    scopus 로고
    • 0021-8979 10.1063/1.368002.
    • J. E. Sader, J. Appl. Phys. 0021-8979 10.1063/1.368002 84, 64 (1998).
    • (1998) J. Appl. Phys. , vol.84 , pp. 64
    • Sader, J.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.