Resonant microcantilever type chemical sensors: Analytical modeling in view of optimization

Sensors and Actuators, B: Chemical

Volumn 91, Issue 1-3, 2003, Pages 353-361

  Dufour, Isabelle ^a   Fadel, Ludivin ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

Author keywords

Analytical modeling; Chemical sensor; Microcantilever; Resonance frequency; Sensitivity

Indexed keywords

COMPUTER SIMULATION; MICROSENSORS; MICROSTRUCTURE; NATURAL FREQUENCIES; RESONANCE; SILICON; SORPTION;

ANALYTICAL MODELING; MICROCANTILEVERS;

CHEMICAL SENSORS;

EID: 12444253519     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00110-2     Document Type: Article

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