Self-sensing micro- and nanocantilevers with Attonewton-scale force resolution

Nano Letters

Volumn 6, Issue 5, 2006, Pages 1000-1006

  Arlett, J L ^a   Maloney, J R ^a   Gudlewski, B ^a   Muluneh, M ^a   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATTONEWTON-SCALE FORCE RESOLUTION; EPILAYER MEMBRANES; NANOELECTROMECHANICAL SYSTEMS; SILICON CANTILEVERS;

CRYOGENICS; LOW TEMPERATURE EFFECTS; OPTICAL RESOLVING POWER; SINGLE CRYSTALS; THERMAL EFFECTS;

CANTILEVER BEAMS;

EID: 33744820846     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl060275y     Document Type: Article

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