Piezoresistive cantilever designed for torque magnetometry

Journal of Applied Physics

Volumn 83, Issue 3, 1998, Pages 1163-1170

  Willemin, M ^a,b   Rossel, C ^b   Brugger, J ^b   Despont, M H ^b   Rothuizen, H ^b   Vettiger, P ^b   Hofer, J ^a,b   Keller, H ^a  

^a UNIVERSITY OF ZURICH   (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000493579     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366811     Document Type: Article

References (23)

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