메뉴 건너뛰기




Volumn 102, Issue 8, 2007, Pages

Copper enhanced (111) texture in silver thin films on amorphous SiO 2

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHIC ORIENTATIONS; DISORDERED REGIONS; GLANCING ANGLE XRD; POLE FIGURE ANALYSIS; RESISTIVITY MEASUREMENT; SILVER THIN FILMS; TEXTURE ENHANCEMENT; TEXTURE EVOLUTIONS;

EID: 57049138788     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2800998     Document Type: Article
Times cited : (11)

References (22)
  • 2
    • 36449002144 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.354283
    • L. Tang and G. Thomas, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.354283 74, 5025 (1993).
    • (1993) J. Appl. Phys. , vol.74 , pp. 5025
    • Tang, L.1    Thomas, G.2
  • 3
    • 2542497001 scopus 로고    scopus 로고
    • APPLAB 0003-6951 10.1063/1.1719276
    • C. Detavernier and C. Lavoie, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1719276 84, 3549 (2004).
    • (2004) Appl. Phys. Lett. , vol.84 , pp. 3549
    • Detavernier, C.1    Lavoie, C.2
  • 6
    • 0001645678 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.361168
    • D. B. Knorr and K. P. Rodbell, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.361168 79, 2409 (1996).
    • (1996) J. Appl. Phys. , vol.79 , pp. 2409
    • Knorr, D.B.1    Rodbell, K.P.2
  • 9
    • 0000722238 scopus 로고
    • APPLAB 0003-6951 10.1063/1.101054
    • J. Cho and C. V. Thompson, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.101054 54, 2577 (1989).
    • (1989) Appl. Phys. Lett. , vol.54 , pp. 2577
    • Cho, J.1    Thompson, C.V.2
  • 11
    • 0345603152 scopus 로고    scopus 로고
    • ASUSEE 0169-4332 10.1016/S0169-4332(03)00888-2
    • Y. S. Jung, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/S0169-4332(03) 00888-2 221, 281 (2004).
    • (2004) Appl. Surf. Sci. , vol.221 , pp. 281
    • Jung, Y.S.1
  • 12
    • 0037960181 scopus 로고    scopus 로고
    • THSFAP 0040-6090 10.1016/S0040-6090(03)00034-8
    • T. L. Alford, L. Chen, and K. S. Gadre, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(03)00034-8 429, 248 (2003).
    • (2003) Thin Solid Films , vol.429 , pp. 248
    • Alford, T.L.1    Chen, L.2    Gadre, K.S.3
  • 15
    • 0242272315 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1609646
    • H. C. Kim, T. L. Alford, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1609646 94, 5393 (2003).
    • (2003) J. Appl. Phys. , vol.94 , pp. 5393
    • Kim, H.C.1    Alford, T.L.2
  • 16
    • 0033723624 scopus 로고    scopus 로고
    • THSFAP 0040-6090 10.1016/S0040-6090(00)00972-X
    • I. Tomov, M. Adamik, and P. B. Barna, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(00)00972-X 371, 17 (2000).
    • (2000) Thin Solid Films , vol.371 , pp. 17
    • Tomov, I.1    Adamik, M.2    Barna, P.B.3
  • 19
    • 21544450961 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1722742
    • W. W. Mullins, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1722742 28, 333 (1957).
    • (1957) J. Appl. Phys. , vol.28 , pp. 333
    • Mullins, W.W.1
  • 20
    • 0001404248 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1337938
    • C. E. Murray and K. P. Rodbell, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1337938 89, 2337 (2001).
    • (2001) J. Appl. Phys. , vol.89 , pp. 2337
    • Murray, C.E.1    Rodbell, K.P.2
  • 22
    • 0033677268 scopus 로고    scopus 로고
    • ARMSCX 0084-6600 10.1146/annurev.matsci.30.1.159.
    • C. V. Thompson, Annu. Rev. Mater. Sci. ARMSCX 0084-6600 10.1146/annurev.matsci.30.1.159 30, 159 (2000).
    • (2000) Annu. Rev. Mater. Sci. , vol.30 , pp. 159
    • Thompson, C.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.