X-ray studies on (110) fiber texture in FeTaN films using Ti underlayers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1190-1193

  Klemmer, T J ^a   Inturi, V R ^a   Barnard, J A ^a  

^a University of Alabama   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHIC ORIENTATIONS; FIBER TEXTURE; GLANCING ANGLE; INDUCTIVE WRITE HEADS; POLE FIGURE; RANDOM ORIENTATIONS; ROCKING CURVES; SPUTTERED FILMS; TEXTURAL INFORMATION; TI UNDERLAYERS; UNDERLAYERS; X-RAY DIFFRACTION TECHNIQUES; X-RAY STUDIES;

X RAY DIFFRACTION;

TEXTURES;

EID: 21744452374     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580591     Document Type: Article

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