Rapid autotuning for crystalline specimens from an inline hologram

Journal of Electron Microscopy

Volumn 57, Issue 6, 2008, Pages 195-201

  Lupini, Andrew R ^a   Pennycook, Stephen J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Aberration correction; Aberration measurement; Cs; Ronchigram; STEM

Indexed keywords

ABERRATIONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HOLOGRAMS; SCANNING ELECTRON MICROSCOPY;

ABERRATION CORRECTION; ABERRATION MEASUREMENT; AUTOTUNING; CS; DYNAMICAL SIMULATION; IN-LINE HOLOGRAMS; MEASUREMENTS OF; RONCHIGRAMS; SMALL PATCHES; STEM;

CRYSTALLINE MATERIALS;

EID: 56549120883     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfn022     Document Type: Article

References (25)

1. Scherzer O (1936) Über einige Fehler von Elektronenlinsen. Zeit. Phys. 101: 593-603.
2. Nellist P D, Chisholm M F , Dellby N, Krivanek O L, Murfitt M F, Szilagyi Z S, Lupini A R, Borisevich A, Sides W H, Jr., and Pennycook S J (2004) Direct Sub-Angstrom Imaging of a Crystal Lattice. Science 305: 1741.
3. Haider M, Uhlemann S, Schwan E, Rose H, Kabius B, and Urban K (1998) Electron microscopy image enhanced. Nature 392: 768-769.
4. Roddier F (ed.) (1999) Adaptive Optics for Astronomy (Cambridge University Press, Cambridge).
5. Haider M, Rose H, Uhlemann S, Kabius B, and Urban K (1998) Towards 0.1 nm resolution with the first spherically corrected Transmission Electron Microscope. J. Electron Microsc. 47: 395-405.
6. Krivanek O L, Dellby N, and Lupini A R (1999) Towards sub-Å electron beams. Ultramicroscopy 78: 1-11.
7. Dellby N, Krivanek O L, Nellist P D, Batson P E, and Lupini A R (2001) Progress in aberration-corrected scanning transmission electron microscopy. J. Electron Microsc. 50: 177-185.
8. Zemlin F, Weiss K, Schiske P, Kunath W, and Herrmann K H (1978) Coma-free alignment of high resolution electron microscopes with the aid of optical diffractograms. Ultramicroscopy 3: 49-60.
9. Gabor D (1948) A new microscopic principle. Nature 161: 777-778.
10. Ronchi V (1964) Forty years of history of a grating interferometer. Appl. Opt. 3.2: 437-451.
11. Lin J A and Cowley J M (1986) Calibration of the operating parameters for an HB5 STEM instrument. Ultramicroscopy 19: 31-42.
12. Wang S-Y and Cowley J M (1995) Shadow Images for In-Line Holography in a STEM instrument. Microsc. Res. Tech. 30: 181-192.
13. Cowley J M (1979) Adjustment of a STEM instrument by use of shadow images. Ultramicroscopy 4: 413-418.
14. James E M and Browning N D (1999) Practical aspects of atomic resolution imaging and spectroscopy in STEM. Ultramicroscopy 78: 125-139.
15. Rodenburg J M and Macack E B (2002) Optimizing the resolution of TEM/STEM with the Electron Ronchigram. Microsc. Anal. 90: 5-7.
16. Rodenburg J M and Bates R H T (1992) The theory of superresolution electron microscopy via Wigner-distribution deconvolution. Phil. Trans. R. Soc. A 339: 521-553.
17. Ramasse Q and Bleloch A L (2005) Diagnosis of aberrations from crystalline samples in scanning transmission electron microscopy. Ultramicroscopy 106: 37-56.
18. Boothroyd C B (1997) Quantification of Energy Filtered Lattice Images and Coherent Convergent Beam Patterns. Scan. Microsc. 11: 31-42.
19. Mitsuishi K, Takeguchi M, Kondo Y, Hosokawa F, Okamoto K, Sannomiya T, Hori M, Iwama T, Kawazoe M, and Furuya K (2006) Ultrahigh-Vacuum Third-Order Spherical Aberration (Cs) Corrector for a Scanning Transmission Electron Microscope. Microsc. Microanal. 12: 456-460.
20. Yamazaki T, Kotaka Y, Kikuchi Y, and Watanabe K (2005) Precise measurement of third-order spherical aberration using low-order zone-axis Ronchigrams. Ultramicroscopy 106: 153-163.
21. Kuramochi K, Yamazaki T, Kotaka Y, Kikuchi Y, Hashimoto I, and Watanabe K (2008) Measurement of twofold astigmatism of probeforming lens using low-order zone-axis ronchigram. Ultramicroscopy 108: 339-345.
22. Spence J C H and Zuo J M (1992) Electron Microdiffraction (Plenum, New York and London).
23. Spence J C H (1996) Quantitative electron microdiffraction. J. Electron Microsc. 45: 19-26.
24. Kirkland E J (1998) Advanced Computing in Electron Microscopy (Plenum, New York and London).
25. Borisevich A Y, Lupini A R, and Pennycook S J (2006) Depth sectioning with the aberration-corrected scanning transmission electron microscope. Proc. Natl Acad. Sci. USA 103: 3044-3048.