Precise measurement of third-order spherical aberration using low-order zone-axis Ronchigrams

Ultramicroscopy

Volumn 106, Issue 3, 2006, Pages 153-163

  Yamazaki, Takashi ^a   Kotaka, Yasutoshi ^b   Kikuchi, Yoshio ^c   Watanabe, Kazuto ^d  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b FUJITSU LABORATORIES LTD   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d TOKYO METROPOLITAN COLLEGE OF INDUSTRIAL TECHNOLOGY   (Japan)

Author keywords

Ronchigram; Spherical aberration coefficients; STEM

Indexed keywords

CRYSTALLINE MATERIALS; LENSES; SPECTRUM ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

RONCHIGRAMS; SPHERICAL ABERRATION COEFFICIENTS; STEM;

ABERRATIONS;

ACCURACY; ARTICLE; CRYSTAL; LENS; MATERIAL STATE; MATERIALS; MEASUREMENT; MECHANICAL PROBE; MICROSCOPY; POWER SPECTRUM; SIMULATION; SPECTROSCOPY; VALIDITY;

EID: 29244438515     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.07.001     Document Type: Article

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