Room temperature electrometry with SUB-10 electron charge resolution

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Lee, Joshua ^a   Zhu, Yong ^a   Seshia, Ashwin ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRONS; MICROMACHINING; PRESSURE EFFECTS;

ELECTRON CHARGE RESOLUTION; ROOM TEMPERATURE;

ELECTROMETERS;

EID: 42549095448     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025033     Document Type: Article

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